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Journal Articles

Method for improving dry etching end point detection based on change in time accumulation correlation of plasma emitting wavelengths

Se-Jin Oh, Chang-Gil Son, Min-kyu Sohn, Doug-Yong Sung, Min-Sung Kim, Ji-Soo Im, Sang Ki Nam
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052204 (2023)
https://doi.org/10.1116/6.0002890
Published: September 2023
View article titled, Method for improving dry etching end point detection based on change in time accumulation correlation of plasma emitting wavelengths
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Journal Articles

Improving detection of plasma etching end point using light compensation on optical emission spectra

Se-Jin Oh, Doug-Yong Sung, Jung-Min Ko, Sang Ki Nam
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 052206 (2022)
https://doi.org/10.1116/6.0002009
Published: September 2022
View article titled, Improving detection of plasma etching end point using light compensation on optical emission spectra
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