Skip to Main Content
AIP Publishing Logo
Search Dropdown Menu
header search
    Search
    Advanced Search |Citation Search
    User Tools Dropdown
    Sign In Open Menu
    Toggle MenuMenu
    • PublishersOpen Menu
      • AIP Publishing
      • Physics Today
      • Acoustical Society of America
      • American Association of Physics Teachers
      • American Crystallographic Association, Inc.
      • AVS: Science and Technology of Materials, Interfaces and Processing
      • Chinese Physical Society
      • Hefei General Machinery Research Institute
      • Laser Institute of America
      • The Society of Rheology
      • Tianjin University
    • PublicationsOpen Menu
      • Journals
      • Physics Today
      • AIP Conference Proceedings
      • Books
    • Special Topics
    • AuthorsOpen External Link
    • LibrariansOpen External Link
    • About
    Skip Nav Destination

    Update search

    Querybuilder input 1
    Filter All
    • All
    • Title
    • Author
    • Author Affiliations
    • Full Text
    • Abstract
    • Keyword
    • DOI
    • ISBN
    • EISBN
    • ISSN
    • EISSN
    • Issue
    • Volume
    • References
    Querybuilder input 2
    Filter All
    • All
    • Title
    • Author
    • Author Affiliations
    • Full Text
    • Abstract
    • Keyword
    • DOI
    • ISBN
    • EISBN
    • ISSN
    • EISSN
    • Issue
    • Volume
    • References
    Querybuilder input 3
    Filter All
    • All
    • Title
    • Author
    • Author Affiliations
    • Full Text
    • Abstract
    • Keyword
    • DOI
    • ISBN
    • EISBN
    • ISSN
    • EISSN
    • Issue
    • Volume
    • References
    Querybuilder input 4
    Filter All
    • All
    • Title
    • Author
    • Author Affiliations
    • Full Text
    • Abstract
    • Keyword
    • DOI
    • ISBN
    • EISBN
    • ISSN
    • EISSN
    • Issue
    • Volume
    • References
    Querybuilder input 5
    Filter All
    • All
    • Title
    • Author
    • Author Affiliations
    • Full Text
    • Abstract
    • Keyword
    • DOI
    • ISBN
    • EISBN
    • ISSN
    • EISSN
    • Issue
    • Volume
    • References
    Querybuilder input 6
    Filter All
    • All
    • Title
    • Author
    • Author Affiliations
    • Full Text
    • Abstract
    • Keyword
    • DOI
    • ISBN
    • EISBN
    • ISSN
    • EISSN
    • Issue
    • Volume
    • References

    NARROW

    Format

    Filter by format

    Topics

    AIP thesaurus
    • Condensed matter physics
      • Condensed matter properties
        • Transport properties
          •  
            Electronic transport
    • Electronics
      • Electronic devices
        • Semiconductor devices
          •  
            Transistors
    • General physics
      • General procedures and instrumentation
        • Laboratory procedures
          • Metrology
            •  
              Stress measurement (1)
    • Interdisciplinary physics
      • Engineering science
        • Electrical engineering
          •  
            Semiconductor device fabrication
    • Materials science
      • Materials analysis
        • Mechanical testing
          •  
            Mechanical stress
        •  
          Nano-indentation (1)
      • Materials degradation
        •  
          Fracture mechanics
      • Materials fabrication
        • Thin film deposition
          •  
            Electrodeposition (1)
          •  
            Focused ion beam (1)
      • Materials properties
        • Deformation
          • Elasticity
            •  
              Elastic modulus
        •  
          Thermal effects
      • Materials synthesis and processing
        •  
          Machining
    •  
      Nanotechnology
    • Optics and optical physics
      • Optical techniques and instrumentation
        •  
          Optical devices
        •  
          Optical metrology

    Journal

    Filter by journal

    Article Type

    Filter by article-type

    Issue Section

    Filter by issue-section

    Date

    Filter by date
    Apply

    Availability

    Availability
    1-2 of 2
    Dietmar Vogel
    Close
    Save search
    Follow your search
    Access your saved searches in your account

    Close Modal
    Sort by
    Journal Articles

    Design for reliability of BEoL and 3-D TSV structures – A joint effort of FEA and innovative experimental techniques

    Available to Purchase
    Jürgen Auersperg, Dietmar Vogel, Ellen Auerswald, Sven Rzepka, Bernd Michel
    Journal: AIP Conference Proceedings
    AIP Conf. Proc. 1601, 138–147 (2014)
    https://doi.org/10.1063/1.4881347
    Published: June 2014
    Abstract
    View articletitled, Design for reliability of BEoL and 3-D TSV structures – A joint effort of FEA and innovative experimental techniques
    Open the PDF for Design for reliability of BEoL and 3-D TSV structures – A joint effort of FEA and innovative experimental techniques in another window
    Journal Articles

    fibDAC Stress Relief—A Novel Stress Measurement Approach For BEoL Structures

    Available to Purchase
    Dietmar Vogel, Bernd Michel
    Journal: AIP Conference Proceedings
    AIP Conf. Proc. 1300, 127–132 (2010)
    https://doi.org/10.1063/1.3527117
    Published: November 2010
    Abstract
    View articletitled, fibDAC Stress Relief—A Novel Stress Measurement Approach For BEoL Structures
    Open the PDF for fibDAC Stress Relief—A Novel Stress Measurement Approach For BEoL Structures in another window

    Resources

    • For Researchers
    • For Librarians
    • For Advertisers
    • Our Publishing Partners 

    Explore

    • Journals
    • Physics Today
    • AIP Conference Proceedings
    • Books
    • Special Topics
    • Publishers

    pubs.aip.org

    • About
    • User Guide
    • Contact Us
    • Register
    • Help
    • Privacy Policy
    • Terms of Use

    Connect with AIP Publishing

    • Facebook
    • LinkedIn
    • Bluesky
    • YouTube
     
     
    • © Copyright AIP Publishing LLC
    Close Modal
    Close Modal
    This Feature Is Available To Subscribers Only

    Sign In or Create an Account

    Close Modal
    Close Modal