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David Attwood
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Journal Articles

A new Scanning Transmission X‐ray Microscope at the ALS for operation up to 2500eV

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David Kilcoyne, Harald Ade, David Attwood, Adam Hitchcock, Pat McKean, Gary Mitchell, Paulo Monteiro, Tolek Tyliszczak, Tony Warwick
Journal: AIP Conference Proceedings
AIP Conf. Proc. 1234, 465–468 (2010)
https://doi.org/10.1063/1.3463241
Published: June 2010
View article titled, A new Scanning Transmission X‐ray Microscope at the ALS for operation up to 2500eV
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Journal Articles

Coherent Soft X‐ray Branchline at the Advanced Light Source

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Kristine Rosfjord, Charles Kemp, Paul Denham, Eric Gullikson, Phillip Batson, Senajith Rekawa, David Attwood
Journal: AIP Conference Proceedings
AIP Conf. Proc. 705, 448–449 (2004)
https://doi.org/10.1063/1.1757830
Published: May 2004
View article titled, Coherent Soft X‐ray Branchline at the Advanced Light Source
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Journal Articles

At‐Wavelength Interferometry of High‐NA Diffraction‐Limited EUV Optics

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Kenneth A. Goldberg, Patrick Naulleau, Senajith Rekawa, Paul Denham, J. Alexander Liddle, Erik Anderson, Keith Jackson, Jeffrey Bokor, David Attwood
Journal: AIP Conference Proceedings
AIP Conf. Proc. 705, 855–860 (2004)
https://doi.org/10.1063/1.1757930
Published: May 2004
View article titled, At‐Wavelength Interferometry of High‐NA Diffraction‐Limited EUV Optics
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Journal Articles

Sub-70 nm extreme ultraviolet lithography at the Advanced Light Source static microfield exposure station using the engineering test stand set-2 optic

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Patrick Naulleau, Kenneth A. Goldberg, Erik H. Anderson, David Attwood, Phillip Batson, Jeffrey Bokor, Paul Denham, Eric Gullikson, Bruce Harteneck, Brian Hoef, Keith Jackson, Deirdre Olynick, Seno Rekawa, Farhad Salmassi, Ken Blaedel, Henry Chapman, Layton Hale, Paul Mirkarimi, Regina Soufli, Eberhard Spiller, Don Sweeney, John Taylor, Chris Walton, Donna O’Connell, Daniel Tichenor, Charles W. Gwyn, Pei-Yang Yan, Guojing Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 20, 2829–2833 (2002)
https://doi.org/10.1116/1.1524976
Published: December 2002
View article titled, Sub-70 nm extreme ultraviolet lithography at the Advanced Light Source static microfield exposure station using the engineering test stand set-2 optic
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Journal Articles

Soft x-ray microscopy and extreme ultraviolet lithography: Imaging in the 20–50 nm regime (abstract) (invited)

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David Attwood
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 73, 1637 (2002)
https://doi.org/10.1063/1.1448129
Published: March 2002
View article titled, Soft x-ray microscopy and extreme ultraviolet lithography: Imaging in the 20–50 nm regime (abstract) (invited)
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Journal Articles

Nanofabrication and diffractive optics for high-resolution x-ray applications

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Erik H. Anderson, Deirdre L. Olynick, Bruce Harteneck, Eugene Veklerov, Gregory Denbeaux, Weilun Chao, Angelic Lucero, Lewis Johnson, David Attwood
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 18, 2970–2975 (2000)
https://doi.org/10.1116/1.1321282
Published: November 2000
View article titled, Nanofabrication and diffractive optics for high-resolution x-ray applications
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Journal Articles

The EUV phase-shifting point diffraction interferometer

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Patrick Naulleau, Kenneth A. Goldberg, Sang H. Lee, Chang Chang, David Attwood, Jeffrey Bokor
Journal: AIP Conference Proceedings
AIP Conf. Proc. 521, 66–72 (2000)
https://doi.org/10.1063/1.1291760
Published: June 2000
View article titled, The EUV phase-shifting point diffraction interferometer
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Journal Articles

The PS/PDI: A high accuracy development tool for diffraction limited short-wavelength optics

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Patrick Naulleau, Kenneth A. Goldberg, Sang H. Lee, Chang Chang, Phillip Batson, David Attwood, Jeffrey Bokor
Journal: AIP Conference Proceedings
AIP Conf. Proc. 507, 595–600 (2000)
https://doi.org/10.1063/1.1291217
Published: May 2000
View article titled, The PS/PDI: A high accuracy development tool for diffraction limited short-wavelength optics
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Journal Articles

At-wavelength interferometry of extreme ultraviolet lithographic optics

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Sang Hun Lee, Patrick Naulleau, Kenneth Goldberg, Edita Tejnil, Hector Medecki, Cynthia Bresloff, Chang Chang, David Attwood, Jeffrey Bokor
Journal: AIP Conference Proceedings
AIP Conf. Proc. 449, 553–557 (1998)
https://doi.org/10.1063/1.56843
Published: November 1998
View article titled, At-wavelength interferometry of extreme ultraviolet lithographic optics
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Journal Articles

High-accuracy interferometry of extreme ultraviolet lithographic optical systems

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Kenneth A. Goldberg, Patrick Naulleau, Sang Lee, Cynthia Bresloff, Craig Henderson, David Attwood, Jeffrey Bokor
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 16, 3435–3439 (1998)
https://doi.org/10.1116/1.590498
Published: November 1998
View article titled, High-accuracy interferometry of extreme ultraviolet lithographic optical systems
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Journal Articles

At-wavelength interferometry for extreme ultraviolet lithography

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Edita Tejnil, Kenneth A. Goldberg, SangHun Lee, Hector Medecki, Phillip J. Batson, Paul E. Denham, Alastair A. MacDowell, Jeffrey Bokor, David Attwood
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 15, 2455–2461 (1997)
https://doi.org/10.1116/1.589666
Published: November 1997
View article titled, At-wavelength interferometry for extreme ultraviolet lithography
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Magazine Articles

New Opportunities at Soft‐X‐Ray Wavelengths

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David Attwood
Journal: Physics Today
Physics Today 45, 24–31 (1992)
https://doi.org/10.1063/1.881314
Published: August 1992
View article titled, New Opportunities at Soft‐X‐Ray Wavelengths
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Journal Articles

Coherence, optics and applications at X‐ray wavelengths

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David Attwood
Journal: AIP Conference Proceedings
AIP Conf. Proc. 215, 270–277 (1990)
https://doi.org/10.1063/1.39797
Published: December 1990
View article titled, Coherence, optics and applications at X‐ray wavelengths
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Journal Articles

Coherent VUV and soft x‐ray radiation from undulators in modern storage rings

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Kwang‐Je Kim, Klaus Halbach, David Attwood
Journal: AIP Conference Proceedings
AIP Conf. Proc. 119, 267–277 (1984)
https://doi.org/10.1063/1.34676
Published: September 1984
View article titled, Coherent VUV and soft x‐ray radiation from undulators in modern storage rings
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Journal Articles

Microwave scattering from an overdense turbulent plasma

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David Attwood
Journal: The Physics of Fluids
Phys. Fluids 17, 1224–1231 (1974)
https://doi.org/10.1063/1.1694869
Published: June 1974
View article titled, Microwave scattering from an overdense turbulent plasma
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Journal Articles

Suppression of ionization waves by hydrodynamic turbulence

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David Attwood
Journal: The Physics of Fluids
Phys. Fluids 17, 1341–1342 (1974)
https://doi.org/10.1063/1.1694890
Published: June 1974
View article titled, Suppression of ionization waves by hydrodynamic turbulence
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Journal Articles

Microwave Scattering from Underdense and Overdense Turbulent Plasmas

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David Attwood
Journal: The Physics of Fluids
Phys. Fluids 15, 942–944 (1972)
https://doi.org/10.1063/1.1694008
Published: May 1972
View article titled, Microwave Scattering from Underdense and Overdense Turbulent Plasmas
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