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Journal Articles

Magnetic metamaterials by ion-implantation

Christina Vantaraki, Petter Ström, Tuan T. Tran, Matías P. Grassi, Giovanni Fevola, Michael Foerster, Jerzy T. Sadowski, Daniel Primetzhofer, Vassilios Kapaklis

Appl. Phys. Lett. 125, 202403 (2024)

https://doi.org/10.1063/5.0239106

Published: November 2024

View article titled, Magnetic metamaterials by ion-implantation

Journal Articles

Interdependence of angular distribution and charge state of hyper-channeled keV ions

Srdjan Petrović, Nikola Starčević, Radek Holeňák, Eleni Ntemou, Daniel Primetzhofer

AIP Conf. Proc. 3251, 040003 (2024)

https://doi.org/10.1063/5.0234257

Published: October 2024

View article titled, Interdependence of angular distribution and charge state of hyper-channeled keV ions

Journal Articles

Epitaxial growth of HfB₂ thin films on Si(111) by magnetron sputtering

Sathish Kumar Shanmugham, Arnaud le Febvrier, Justinas Palisaitis, Per O. Å. Persson, Robert J. W. Frost, Daniel Primetzhofer, Ivan Petrov, Hans Högberg, Jens Birch, Johanna Rosen, Per Eklund, Sanjay Nayak

J. Appl. Phys. 136, 115304 (2024)

https://doi.org/10.1063/5.0207776

Published: September 2024

View article titled, Epitaxial growth of HfB2 thin films on Si(111) by magnetron sputtering

Journal Articles

Monolayer calibration of endofullerenes with x-ray absorption from implanted keV ion doses

Wei Chuang Lee, Lebin Yu, Johan Oscarsson, Michal W. Ochapski, Ryunosuke Sagehashi, Yang Zhang, Alexey A. Popov, Zewdu M. Gebeyehu, Leonardo Martini, Stiven Forti, Camilla Coletti, Bernard Delley, Matthias Muntwiler, Daniel Primetzhofer, Thomas Greber

J. Vac. Sci. Technol. A 42, 023406 (2024)

https://doi.org/10.1116/6.0003302

Published: January 2024

View article titled, Monolayer calibration of endofullerenes with x-ray absorption from implanted keV ion doses

Journal Articles

High-mass metal ion irradiation enables growth of high-entropy sublattice nitride thin films from elemental targets

Vladyslav Rogoz, Oleksandr Pshyk, Bartosz Wicher, Justinas Palisaitis, Jun Lu, Daniel Primetzhofer, Ivan Petrov, Lars Hultman, Grzegorz Greczynski

J. Vac. Sci. Technol. A 41, 063108 (2023)

https://doi.org/10.1116/6.0003065

Published: October 2023

View article titled, High-mass metal ion irradiation enables growth of high-entropy sublattice nitride thin films from elemental targets

Journal Articles

Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering

Faezeh A. F. Lahiji, Samiran Bairagi, Roger Magnusson, Mauricio A. Sortica, Daniel Primetzhofer, Erik Ekström, Biplab Paul, Arnaud le Febvrier, Per Eklund

J. Vac. Sci. Technol. A 41, 063402 (2023)

https://doi.org/10.1116/6.0002914

Published: September 2023

View article titled, Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering

Includes: Supplementary data

Journal Articles

Low temperature epitaxial growth of Cantor-nitride thin films by magnetic field assisted magnetron sputtering

Smita G. Rao, Pascal Manuel Illgner, Robert Boyd, Gyula Nagy, Philippe Djemia, Daniel Primetzhofer, Ivan Petrov, Arnaud le Febvrier, Per Eklund

J. Vac. Sci. Technol. A 41, 053415 (2023)

https://doi.org/10.1116/6.0002947

Published: August 2023

View article titled, Low temperature epitaxial growth of Cantor-nitride thin films by magnetic field assisted magnetron sputtering

Includes: Supplementary data

Journal Articles

A new setup for optical measurements under controlled environment

Dmitrii Moldarev, Kristina Komander, Radek Holeňák, Max Wolff, Daniel Primetzhofer

Rev. Sci. Instrum. 94, 035104 (2023)

https://doi.org/10.1063/5.0142068

Published: March 2023

View article titled, A new setup for optical measurements under controlled environment

Includes: Supplementary data

Journal Articles

Biased quartz crystal microbalance method for studies of chemical vapor deposition surface chemistry induced by plasma electrons

Pentti Niiranen, Hama Nadhom, Michal Zanáška, Robert Boyd, Mauricio Sortica, Daniel Primetzhofer, Daniel Lundin, Henrik Pedersen

Rev. Sci. Instrum. 94, 023902 (2023)

https://doi.org/10.1063/5.0122143

Published: February 2023

View article titled, Biased quartz crystal microbalance method for studies of chemical vapor deposition surface chemistry induced by plasma electrons

Journal Articles

Unprecedented severe atomic redistribution in germanium induced by MeV self-irradiation

Tuan T. Tran, Daniel Primetzhofer

AIP Advances 12, 015209 (2022)

https://doi.org/10.1063/5.0077219

Published: January 2022

View article titled, Unprecedented severe atomic redistribution in germanium induced by MeV self-irradiation

Includes: Supplementary data

Journal Articles

Systematic compositional analysis of sputter-deposited boron-containing thin films

Babak Bakhit, Daniel Primetzhofer, Eduardo Pitthan, Mauricio A. Sortica, Eleni Ntemou, Johanna Rosen, Lars Hultman, Ivan Petrov, Grzegorz Greczynski

J. Vac. Sci. Technol. A 39, 063408 (2021)

https://doi.org/10.1116/6.0001234

Published: September 2021

View article titled, Systematic compositional analysis of sputter-deposited boron-containing thin films

Journal Articles

Assessing the potential of ion beam analytical techniques for depth profiling Li in thin film Li ion batteries

Vairavel Mathayan, Kenji Morita, Bun Tsuchiya, Rongbin Ye, Mamoru Baba, Marcos V. Moro, Daniel Primetzhofer

J. Appl. Phys. 130, 125306 (2021)

https://doi.org/10.1063/5.0055963

Published: September 2021

View article titled, Assessing the potential of ion beam analytical techniques for depth profiling Li in thin film Li ion batteries

Journal Articles

Environmental dependence of the photochromic effect of oxygen-containing rare-earth metal hydrides

Dmitrii Moldarev, Levin Stolz, Marcos V. Moro, Sigurbjörn M. Aðalsteinsson, Ioan-Augustin Chioar, Smagul Zh. Karazhanov, Daniel Primetzhofer, Max Wolff

J. Appl. Phys. 129, 153101 (2021)

https://doi.org/10.1063/5.0041487

Published: April 2021

View article titled, Environmental dependence of the photochromic effect of oxygen-containing rare-earth metal hydrides

Includes: Supplementary data

Journal Articles

In-operando observation of Li depth distribution and Li transport in thin film Li ion batteries

Vairavel Mathayan, Marcos V. Moro, Kenji Morita, Bun Tsuchiya, Rongbin Ye, Mamoru Baba, Daniel Primetzhofer

Appl. Phys. Lett. 117, 023902 (2020)

https://doi.org/10.1063/5.0014761

Published: July 2020

View article titled, In-operando observation of Li depth distribution and Li transport in thin film Li ion batteries

Includes: Supplementary data

Journal Articles

Low temperature oxidation behavior of Mo₂BC coatings

Jan-Ole Achenbach, Soheil Karimi Aghda, Marcus Hans, Daniel Primetzhofer, Damian M. Holzapfel, Danilo J. Miljanovic, Jochen M. Schneider

J. Vac. Sci. Technol. A 38, 023403 (2020)

https://doi.org/10.1116/1.5141993

Published: February 2020

View article titled, Low temperature oxidation behavior of Mo2BC coatings

Journal Articles

Tailoring magnetic order via atomically stacking 3d/5d electrons to achieve high-performance spintronic devices

Appl. Phys. Rev. 7, 011401 (2020)

https://doi.org/10.1063/1.5124373

Published: January 2020

View article titled, Tailoring magnetic order via atomically stacking 3d/5d electrons to achieve high-performance spintronic devices

Includes: Supplementary data

Journal Articles

Atomic layer deposition of amorphous tin-gallium oxide films

Fredrik Larsson, Jan Keller, Daniel Primetzhofer, Lars Riekehr, Marika Edoff, Tobias Törndahl

J. Vac. Sci. Technol. A 37, 030906 (2019)

https://doi.org/10.1116/1.5092877

Published: April 2019

View article titled, Atomic layer deposition of amorphous tin-gallium oxide films

Journal Articles

Formation of nickel germanides from Ni layers with thickness below 10 nm

Lukas Jablonka, Tomas Kubart, Daniel Primetzhofer, Ahmad Abedin, Per-Erik Hellström, Mikael Östling, Jean Jordan-Sweet, Christian Lavoie, Shi-Li Zhang, Zhen Zhang

J. Vac. Sci. Technol. B 35, 020602 (2017)

https://doi.org/10.1116/1.4975152

Published: January 2017

View article titled, Formation of nickel germanides from Ni layers with thickness below 10 nm

Journal Articles

Massive Ta diffusion observed in Cu thin films but not in Ag counterparts

Shabnam Mardani, Hans Norström, Fredrik Gustavsson, Tomas Nyberg, Daniel Primetzhofer, Klaus Leifer, Dongping Wu, Shi-Li Zhang

J. Vac. Sci. Technol. B 34, 060604 (2016)

https://doi.org/10.1116/1.4968418

Published: November 2016

View article titled, Massive Ta diffusion observed in Cu thin films but not in Ag counterparts

Journal Articles

Structural, mechanical, and magnetic properties of GaFe₃N thin films

Muhammad Junaid, Denis Music, Marcus Hans, Jochen M. Schneider, Tanja Scholz, Richard Dronskowski, Daniel Primetzhofer

J. Vac. Sci. Technol. A 34, 040601 (2016)

https://doi.org/10.1116/1.4949262

Published: May 2016

View article titled, Structural, mechanical, and magnetic properties of GaFe3N thin films

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Magnetic metamaterials by ion-implantation

Interdependence of angular distribution and charge state of hyper-channeled keV ions

Epitaxial growth of HfB₂ thin films on Si(111) by magnetron sputtering

Monolayer calibration of endofullerenes with x-ray absorption from implanted keV ion doses

High-mass metal ion irradiation enables growth of high-entropy sublattice nitride thin films from elemental targets

Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering

Low temperature epitaxial growth of Cantor-nitride thin films by magnetic field assisted magnetron sputtering

A new setup for optical measurements under controlled environment

Biased quartz crystal microbalance method for studies of chemical vapor deposition surface chemistry induced by plasma electrons

Unprecedented severe atomic redistribution in germanium induced by MeV self-irradiation

Systematic compositional analysis of sputter-deposited boron-containing thin films

Assessing the potential of ion beam analytical techniques for depth profiling Li in thin film Li ion batteries

Environmental dependence of the photochromic effect of oxygen-containing rare-earth metal hydrides

In-operando observation of Li depth distribution and Li transport in thin film Li ion batteries

Low temperature oxidation behavior of Mo₂BC coatings

Tailoring magnetic order via atomically stacking 3d/5d electrons to achieve high-performance spintronic devices

Atomic layer deposition of amorphous tin-gallium oxide films

Formation of nickel germanides from Ni layers with thickness below 10 nm

Massive Ta diffusion observed in Cu thin films but not in Ag counterparts

Structural, mechanical, and magnetic properties of GaFe₃N thin films

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