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    D. Nyyssonen
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    Journal Articles

    Two‐dimensional atomic force microprobe trench metrology system

    D. Nyyssonen, L. Landstein, E. Coombs
    Journal: Journal of Vacuum Science & Technology B
    J. Vac. Sci. Technol. B 9, 3612–3616 (1991)
    https://doi.org/10.1116/1.585855
    Published: November 1991
    Abstract
    View articletitled, Two‐dimensional atomic force microprobe trench metrology system
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    Proceedings Papers

    Laser micrometrology for integrated circuits

    D. Nyyssonen
    Abstract
    View Paper titled, Laser micrometrology for integrated circuits
    Open the PDF for Laser micrometrology for integrated circuits in another window

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