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Journal Articles

Real-time measurements of plasma photoresist modifications: The role of plasma vacuum ultraviolet radiation and ions

F. Weilnboeck, N. Kumar, G. S. Oehrlein, T.-Y. Chung, D. Graves, M. Li, E. A. Hudson, E. C. Benck
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 031807 (2012)
https://doi.org/10.1116/1.3697752
Published: May 2012
View article titled, Real-time measurements of plasma photoresist modifications: The role of plasma vacuum ultraviolet radiation and ions
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Journal Articles

Photoresist modifications by plasma vacuum ultraviolet radiation: The role of polymer structure and plasma chemistry

F. Weilnboeck, R. L. Bruce, S. Engelmann, G. S. Oehrlein, D. Nest, T.-Y. Chung, D. Graves, M. Li, D. Wang, C. Andes, E. A. Hudson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, 993–1004 (2010)
https://doi.org/10.1116/1.3484249
Published: September 2010
View article titled, Photoresist modifications by plasma vacuum ultraviolet radiation: The role of polymer structure and plasma chemistry
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Journal Articles

Dependence of photoresist surface modifications during plasma-based pattern transfer on choice of feedgas composition: Comparison of C 4 F 8 - and C F 4 -based discharges

S. Engelmann, R. L. Bruce, F. Weilnboeck, M. Sumiya, T. Kwon, R. Phaneuf, G. S. Oehrlein, C. Andes, D. Graves, D. Nest, E. A. Hudson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 1165–1179 (2009)
https://doi.org/10.1116/1.3137012
Published: May 2009
View article titled, Dependence of photoresist surface modifications during plasma-based pattern transfer on choice of feedgas composition: Comparison of C 4 F 8 - and C F 4 -based discharges
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Journal Articles

Plasma-surface interactions of advanced photoresists with C 4 F 8 ∕ Ar discharges: Plasma parameter dependencies

S. Engelmann, R. L. Bruce, M. Sumiya, T. Kwon, R. Phaneuf, G. S. Oehrlein, C. Andes, D. Graves, D. Nest, E. A. Hudson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 92–106 (2009)
https://doi.org/10.1116/1.3054342
Published: January 2009
View article titled, Plasma-surface interactions of advanced photoresists with C 4 F 8 ∕ Ar discharges: Plasma parameter dependencies
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Journal Articles

Plasma-surface interactions of model polymers for advanced photoresists using C 4 F 8 ∕ Ar discharges and energetic ion beams

S. Engelmann, R. L. Bruce, T. Kwon, R. Phaneuf, G. S. Oehrlein, Y. C. Bae, C. Andes, D. Graves, D. Nest, E. A. Hudson, P. Lazzeri, E. Iacob, M. Anderle
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 1353–1364 (2007)
https://doi.org/10.1116/1.2759935
Published: July 2007
View article titled, Plasma-surface interactions of model polymers for advanced photoresists using C 4 F 8 ∕ Ar discharges and energetic ion beams
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Journal Articles

Range‐dependent normal modes in underwater sound propagation

R. D. Graves, Anton Nagl, H. Überall, G. L. Zarur
Journal: The Journal of the Acoustical Society of America
J. Acoust. Soc. Am. 59, S43 (1976)
https://doi.org/10.1121/1.2002699
Published: August 2005
View article titled, Range‐dependent normal modes in underwater sound propagation
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Journal Articles

Effect of internal tides on underwater sound propagation

G. L. Zarur, R. D. Graves, Anton Nagl, H. Überall
Journal: The Journal of the Acoustical Society of America
J. Acoust. Soc. Am. 59, S44 (1976)
https://doi.org/10.1121/1.2002702
Published: August 2005
View article titled, Effect of internal tides on underwater sound propagation
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Journal Articles

Mode coupling in a sound channel with range‐dependent parabolic velocity profile

F. S. Chwieroth, A. Nagl, H. Überall, R. D. Graves, G. L. Zarur
Journal: The Journal of the Acoustical Society of America
J. Acoust. Soc. Am. 64, 1105–1112 (1978)
https://doi.org/10.1121/1.382071
Published: October 1978
View article titled, Mode coupling in a sound channel with range‐dependent parabolic velocity profile
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Journal Articles

Range‐dependent normal modes in underwater sound propagation: Application to the wedge‐shaped ocean

R. D. Graves, Anton Nagl, H. Überall, G. L. Zarur
Journal: The Journal of the Acoustical Society of America
J. Acoust. Soc. Am. 58, 1171–1177 (1975)
https://doi.org/10.1121/1.380800
Published: December 1975
View article titled, Range‐dependent normal modes in underwater sound propagation: Application to the wedge‐shaped ocean
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Journal Articles

Normal‐mode theory of underwater sound propagation from stationary multipole sources: results for a realistic sound‐speed profile

Anton J. Haug, Ronald D. Graves, H. Überall
Journal: The Journal of the Acoustical Society of America
J. Acoust. Soc. Am. 57, 1052–1061 (1975)
https://doi.org/10.1121/1.380553
Published: May 1975
View article titled, Normal‐mode theory of underwater sound propagation from stationary multipole sources: results for a realistic sound‐speed profile
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Journal Articles

Normal‐mode theory of underwater sound propagation from directional multipole sources

Anton Haug, Ronald D. Graves, H. Überall
Journal: The Journal of the Acoustical Society of America
J. Acoust. Soc. Am. 56, 387–391 (1974)
https://doi.org/10.1121/1.1903270
Published: August 1974
View article titled, Normal‐mode theory of underwater sound propagation from directional multipole sources
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Journal Articles

Normal‐mode calculations of underwater sound propagation from transducer arrays

R. D. Graves, H. Überall, A. J. Haug
Journal: The Journal of the Acoustical Society of America
J. Acoust. Soc. Am. 55, S45 (1974)
https://doi.org/10.1121/1.1919727
Published: April 1974
View article titled, Normal‐mode calculations of underwater sound propagation from transducer arrays
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Journal Articles

Normal‐mode calculations of underwater sound propagation from directional sources

A. J. Haug, R. D. Graves, H. Überall
Journal: The Journal of the Acoustical Society of America
J. Acoust. Soc. Am. 55, S44–S45 (1974)
https://doi.org/10.1121/1.1919721
Published: April 1974
View article titled, Normal‐mode calculations of underwater sound propagation from directional sources
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Journal Articles

A Photo‐Multiplier Gamma‐Ray Detector

J. D. Graves, G. E. Koch
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 21, 304–307 (1950)
https://doi.org/10.1063/1.1745569
Published: April 1950
View article titled, A Photo‐Multiplier Gamma‐Ray Detector
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Journal Articles

A Scintillation Counter for Laboratory Counting of Alpha‐Particles

J. D. Graves, J. P. Dyson
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 20, 560–565 (1949)
https://doi.org/10.1063/1.1741616
Published: August 1949
View article titled, A Scintillation Counter for Laboratory Counting of Alpha‐Particles
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Journal Articles

A 40‐Centimeter Trochoidal Type Mass Spectrometer: Trochotron

G. W. Monk, J. D. Graves, J. L. Horton
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 18, 796 (1947)
https://doi.org/10.1063/1.1740844
Published: October 1947
View article titled, A 40‐Centimeter Trochoidal Type Mass Spectrometer: Trochotron
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