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Journal Articles

The characteristics of ion acoustic solitons in nonthermal regularized kappa distributed plasmas

L.-N. Hau, C.-S. Jao, C.-K. Chang
Journal: Physics of Plasmas
Phys. Plasmas 31, 032113 (2024)
https://doi.org/10.1063/5.0174948
Published: March 2024
View article titled, The characteristics of ion acoustic solitons in nonthermal regularized kappa distributed plasmas
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Journal Articles

Deep-ultraviolet resist contamination for copper/low-k dual-damascene patterning

R. Kumar, N. Singh, C. K. Chang, L. Dong, T. K. S. Wong
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 22, 1052–1059 (2004)
https://doi.org/10.1116/1.1738672
Published: May 2004
View article titled, Deep-ultraviolet resist contamination for copper/low-<em>k</em> dual-damascene patterning
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Journal Articles

Spectroscopic studies of Sb3+ color centers in alkali halide single crystals

K. O. Choi, S. W. Lee, H. K. Bae, S. H. Jung, C. K. Chang, J. G. Kang
Journal: The Journal of Chemical Physics
J. Chem. Phys. 94, 6420–6428 (1991)
https://doi.org/10.1063/1.460271
Published: May 1991
View article titled, Spectroscopic studies of Sb<sup>3+</sup> color centers in alkali halide single crystals
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Journal Articles

Atomic mean excitation energies for stopping powers from local plasma oscillator strengths

J. W. Wilson, Y. J. Xu, C. K. Chang, E. Kamaratos
Journal: Journal of Applied Physics
J. Appl. Phys. 56, 860–861 (1984)
https://doi.org/10.1063/1.334023
Published: August 1984
View article titled, Atomic mean excitation energies for stopping powers from local plasma oscillator strengths
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Journal Articles

Ionic bond effects on the mean excitation energy for stopping power

J. W. Wilson, C. K. Chang, Y. J. Xu, E. Kamaratos
Journal: Journal of Applied Physics
J. Appl. Phys. 53, 828–830 (1982)
https://doi.org/10.1063/1.330588
Published: February 1982
View article titled, Ionic bond effects on the mean excitation energy for stopping power
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