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Journal Articles

The influence of alloying on the phase formation sequence of ultra-thin nickel silicide films and on the inheritance of texture

F. A. Geenen, E. Solano, J. Jordan-Sweet, C. Lavoie, C. Mocuta, C. Detavernier
Journal: Journal of Applied Physics
J. Appl. Phys. 123, 185302 (2018)
https://doi.org/10.1063/1.5022070
Published: May 2018
View article titled, The influence of alloying on the phase formation sequence of ultra-thin nickel silicide films and on the inheritance of texture
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Journal Articles

Controlling the formation and stability of ultra-thin nickel silicides - An alloying strategy for preventing agglomeration

F. A. Geenen, K. van Stiphout, A. Nanakoudis, S. Bals, A. Vantomme, J. Jordan-Sweet, C. Lavoie, C. Detavernier
Journal: Journal of Applied Physics
J. Appl. Phys. 123, 075303 (2018)
https://doi.org/10.1063/1.5009641
Published: February 2018
View article titled, Controlling the formation and stability of ultra-thin nickel silicides - An alloying strategy for preventing agglomeration
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Includes: Supplementary data
Journal Articles

Impact of laser anneal on NiPt silicide texture and chemical composition

C. Feautrier, A. S. Ozcan, C. Lavoie, A. Valery, R. Beneyton, C. Borowiak, L. Clément, A. Pofelski, B. Salem
Journal: Journal of Applied Physics
J. Appl. Phys. 121, 225109 (2017)
https://doi.org/10.1063/1.4985279
Published: June 2017
View article titled, Impact of laser anneal on NiPt silicide texture and chemical composition
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Includes: Supplementary data
Journal Articles

Texture in thin film silicides and germanides: A review

B. De Schutter, K. De Keyser, C. Lavoie, C. Detavernier
Journal: Applied Physics Reviews
Appl. Phys. Rev. 3, 031302 (2016)
https://doi.org/10.1063/1.4960122
Published: August 2016
View article titled, Texture in thin film silicides and germanides: A review
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Journal Articles

Phase formation and texture of thin nickel germanides on Ge(001) and Ge(111)

B. De Schutter, K. Van Stiphout, N. M. Santos, E. Bladt, J. Jordan-Sweet, S. Bals, C. Lavoie, C. M. Comrie, A. Vantomme, C. Detavernier
Journal: Journal of Applied Physics
J. Appl. Phys. 119, 135305 (2016)
https://doi.org/10.1063/1.4945317
Published: April 2016
View article titled, Phase formation and texture of thin nickel germanides on Ge(001) and Ge(111)
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Includes: Supplementary data
Journal Articles

The thermally-induced reaction of thin Ni films with Si: Effect of the substrate orientation

S. Gaudet, P. Desjardins, C. Lavoie
Journal: Journal of Applied Physics
J. Appl. Phys. 110, 113524 (2011)
https://doi.org/10.1063/1.3662110
Published: December 2011
View article titled, The thermally-induced reaction of thin Ni films with Si: Effect of the substrate orientation
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Includes: Supplementary data
Journal Articles

Metastable phase formation during the reaction of Ni films with Si(001): The role of texture inheritance

S. Gaudet, C. Coia, P. Desjardins, C. Lavoie
Journal: Journal of Applied Physics
J. Appl. Phys. 107, 093515 (2010)
https://doi.org/10.1063/1.3327451
Published: May 2010
View article titled, Metastable phase formation during the reaction of Ni films with Si(001): The role of texture inheritance
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Journal Articles

Phase formation and thermal stability of ultrathin nickel-silicides on Si(100)

K. De Keyser, C. Van Bockstael, R. L. Van Meirhaeghe, C. Detavernier, E. Verleysen, H. Bender, W. Vandervorst, J. Jordan-Sweet, C. Lavoie
Journal: Applied Physics Letters
Appl. Phys. Lett. 96, 173503 (2010)
https://doi.org/10.1063/1.3384997
Published: April 2010
View article titled, Phase formation and thermal stability of ultrathin nickel-silicides on Si(100)
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Journal Articles

In situ x-ray diffraction study of graphitic carbon formed during heating and cooling of amorphous-C/Ni bilayers

K. L. Saenger, J. C. Tsang, A. A. Bol, J. O. Chu, A. Grill, C. Lavoie
Journal: Applied Physics Letters
Appl. Phys. Lett. 96, 153105 (2010)
https://doi.org/10.1063/1.3397985
Published: April 2010
View article titled, <em>In situ</em> x-ray diffraction study of graphitic carbon formed during heating and cooling of amorphous-C/Ni bilayers
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Journal Articles

In situ x-ray diffraction study of Ni–Yb interlayer and alloy systems on Si(100)

W. Knaepen, J. Demeulemeester, J. Jordan-Sweet, A. Vantomme, C. Detavernier, R. L. Van Meirhaeghe, C. Lavoie
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 20–26 (2010)
https://doi.org/10.1116/1.3259875
Published: November 2009
View article titled, <em>In situ</em> x-ray diffraction study of Ni–Yb interlayer and alloy systems on Si(100)
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Journal Articles

In situ study of the formation of silicide phases in amorphous Ni–Si mixed layers

C. Van Bockstael, C. Detavernier, R. L. Van Meirhaeghe, J. L. Jordan-Sweet, C. Lavoie
Journal: Journal of Applied Physics
J. Appl. Phys. 106, 064515 (2009)
https://doi.org/10.1063/1.3194318
Published: September 2009
View article titled, <em>In situ</em> study of the formation of silicide phases in amorphous Ni–Si mixed layers
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Journal Articles

In situ x-ray diffraction study of metal induced crystallization of amorphous germanium

W. Knaepen, S. Gaudet, C. Detavernier, R. L. Van Meirhaeghe, J. Jordan Sweet, C. Lavoie
Journal: Journal of Applied Physics
J. Appl. Phys. 105, 083532 (2009)
https://doi.org/10.1063/1.3110722
Published: April 2009
View article titled, <em>In situ</em> x-ray diffraction study of metal induced crystallization of amorphous germanium
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Journal Articles

Influence of a transient hexagonal phase on the microstructure and morphological stability of NiSi films

C. Van Bockstael, K. De Keyser, R. L. Van Meirhaeghe, C. Detavernier, J. L. Jordan-Sweet, C. Lavoie
Journal: Applied Physics Letters
Appl. Phys. Lett. 94, 033504 (2009)
https://doi.org/10.1063/1.3073750
Published: January 2009
View article titled, Influence of a transient hexagonal phase on the microstructure and morphological stability of NiSi films
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Journal Articles

Simultaneous real-time x-ray diffraction spectroscopy, Rutherford backscattering spectrometry, and sheet resistance measurements to study thin film growth kinetics by Kissinger plots

D. Smeets, J. Demeulemeester, D. Deduytsche, C. Detavernier, C. M. Comrie, C. C. Theron, C. Lavoie, A. Vantomme
Journal: Journal of Applied Physics
J. Appl. Phys. 104, 103538 (2008)
https://doi.org/10.1063/1.3021110
Published: November 2008
View article titled, Simultaneous real-time x-ray diffraction spectroscopy, Rutherford backscattering spectrometry, and sheet resistance measurements to study thin film growth kinetics by Kissinger plots
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Journal Articles

Formation and stability of NiSi in the presence of Co and Fe alloying elements

D. Deduytsche, C. Detavernier, R. L. Van Meirhaeghe, J. L. Jordan-Sweet, C. Lavoie
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 26, 1971–1977 (2008)
https://doi.org/10.1116/1.3010719
Published: November 2008
View article titled, Formation and stability of NiSi in the presence of Co and Fe alloying elements
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Journal Articles

Nucleation and diffusion during growth of ternary Co 1 − x Ni x Si 2 thin films studied by complementary techniques in real time

D. Smeets, J. Demeulemeester, K. De Keyser, D. Deduytsche, C. Detavernier, C. M. Comrie, C. C. Theron, C. Lavoie, A. Vantomme
Journal: Journal of Applied Physics
J. Appl. Phys. 104, 093533 (2008)
https://doi.org/10.1063/1.3013449
Published: November 2008
View article titled, Nucleation and diffusion during growth of ternary Co 1 − x Ni x Si 2 thin films studied by complementary techniques in <em>real time</em>
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Journal Articles

Effect of Pt addition on growth stress and thermal stress of NiSi films

C. Van Bockstael, K. De Keyser, D. Deduytsche, R. L. Van Meirhaeghe, C. Detavernier, J. L. Jordan-Sweet, C. Lavoie
Journal: Journal of Applied Physics
J. Appl. Phys. 104, 053510 (2008)
https://doi.org/10.1063/1.2973679
Published: September 2008
View article titled, Effect of Pt addition on growth stress and thermal stress of NiSi films
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Journal Articles

Texture of NiSi films on Si(001), (111), and (110) substrates

C. Detavernier, J. Jordan-Sweet, C. Lavoie
Journal: Journal of Applied Physics
J. Appl. Phys. 103, 113526 (2008)
https://doi.org/10.1063/1.2937183
Published: June 2008
View article titled, Texture of NiSi films on Si(001), (111), and (110) substrates
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Journal Articles

The role of lattice mismatch and kinetics in texture development: Co 1 − x Ni x Si 2 thin films on Si(100)

D. Smeets, A. Vantomme, K. De Keyser, C. Detavernier, C. Lavoie
Journal: Journal of Applied Physics
J. Appl. Phys. 103, 063506 (2008)
https://doi.org/10.1063/1.2888554
Published: March 2008
View article titled, The role of lattice mismatch and kinetics in texture development: Co 1 − x Ni x Si 2 thin films on Si(100)
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Journal Articles

Kinetics of Ni 3 Si 2 formation in the Ni 2 Si – Ni Si thin film reaction from in situ measurements

J. A. Kittl, M. A. Pawlak, C. Torregiani, A. Lauwers, C. Demeurisse, C. Vrancken, P. P. Absil, S. Biesemans, C. Detavernier, J. Jordan-Sweet, C. Lavoie
Journal: Applied Physics Letters
Appl. Phys. Lett. 91, 232102 (2007)
https://doi.org/10.1063/1.2822411
Published: December 2007
View article titled, Kinetics of Ni 3 Si 2 formation in the Ni 2 Si – Ni Si thin film reaction from <em>in situ</em> measurements
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