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J. Vac. Sci. Technol. A 18, 2412–2416 (2000)
Published: September 2000
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J. Vac. Sci. Technol. A 18, 2378–2383 (2000)
Published: September 2000
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J. Vac. Sci. Technol. A 15, 2836–2841 (1997)
Published: November 1997
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