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Journal Articles

Characterization of vapor draw vessel performance for low-volatility solid precursor delivery

James E. Maslar, William A. Kimes, Brent A. Sperling, Ravindra K. Kanjolia
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 012403 (2021)
https://doi.org/10.1116/6.0000676
Published: December 2020
View article titled, Characterization of vapor draw vessel performance for low-volatility solid precursor delivery
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Journal Articles

Experiment-based modeling of a vapor draw ampoule used for low-volatility precursors

Editor’s Pick
Brent A. Sperling, James E. Maslar
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 060907 (2019)
https://doi.org/10.1116/1.5125446
Published: October 2019
View article titled, Experiment-based modeling of a vapor draw ampoule used for low-volatility precursors
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Journal Articles

Nonvolatile memory based on redox-active ruthenium molecular monolayers

Kai Jiang, Sujitra J. Pookpanratana, Tong Ren, Sean N. Natoli, Brent A. Sperling, Joseph Robertson, Curt A. Richter, Sheng Yu, Qiliang Li
Journal: Applied Physics Letters
Appl. Phys. Lett. 115, 162102 (2019)
https://doi.org/10.1063/1.5108675
Published: October 2019
View article titled, Nonvolatile memory based on redox-active ruthenium molecular monolayers
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Journal Articles

Characterization of bubbler performance for low-volatility liquid precursor delivery

James E. Maslar, William A. Kimes, Brent A. Sperling, Ravindra K. Kanjolia
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 041506 (2019)
https://doi.org/10.1116/1.5099264
Published: June 2019
View article titled, Characterization of bubbler performance for low-volatility liquid precursor delivery
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Journal Articles

In situ infrared spectroscopy during La2O3 atomic layer deposition using La(iPrCp)3 and H2O

Brent A. Sperling, James E. Maslar, Sergei V. Ivanov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 031513 (2018)
https://doi.org/10.1116/1.5026488
Published: April 2018
View article titled, <em>In situ</em> infrared spectroscopy during La<sub>2</sub>O<sub>3</sub> atomic layer deposition using La(<sup><em>i</em></sup>PrCp)<sub>3</sub> and H<sub>2</sub>O
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Journal Articles

In situ metrology to characterize water vapor delivery during atomic layer deposition

Tariq Ahmido, William A. Kimes, Brent A. Sperling, Joseph T. Hodges, James E. Maslar
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 031512 (2016)
https://doi.org/10.1116/1.4948360
Published: May 2016
View article titled, <em>In situ</em> metrology to characterize water vapor delivery during atomic layer deposition
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Journal Articles

Time-resolved surface infrared spectroscopy during atomic layer deposition of TiO2 using tetrakis(dimethylamido)titanium and water

Brent A. Sperling, John Hoang, William A. Kimes, James E. Maslar, Kristen L. Steffens, Nhan V. Nguyen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 031513 (2014)
https://doi.org/10.1116/1.4872166
Published: April 2014
View article titled, Time-resolved surface infrared spectroscopy during atomic layer deposition of TiO<sub>2</sub> using tetrakis(dimethylamido)titanium and water
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Journal Articles

Time-resolved Fourier transform infrared spectroscopy of the gas phase during atomic layer deposition

Brent A. Sperling, William A. Kimes, James E. Maslar, Pamela M. Chu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 613–621 (2010)
https://doi.org/10.1116/1.3455187
Published: June 2010
View article titled, Time-resolved Fourier transform infrared spectroscopy of the gas phase during atomic layer deposition
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Journal Articles

Kinetic roughening of amorphous silicon during hot-wire chemical vapor deposition at low temperature

Brent A. Sperling, John R. Abelson
Journal: Journal of Applied Physics
J. Appl. Phys. 101, 024915 (2007)
https://doi.org/10.1063/1.2424527
Published: January 2007
View article titled, Kinetic roughening of amorphous silicon during hot-wire chemical vapor deposition at low temperature
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Journal Articles

Simultaneous short-range smoothening and global roughening during growth of hydrogenated amorphous silicon films

Brent A. Sperling, John R. Abelson
Journal: Applied Physics Letters
Appl. Phys. Lett. 85, 3456–3458 (2004)
https://doi.org/10.1063/1.1777414
Published: October 2004
View article titled, Simultaneous short-range smoothening and global roughening during growth of hydrogenated amorphous silicon films
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Journal Articles

Comment on “Formation of nanocrystallites governed by the initial stress in the ultrathin hydrogenated amorphous silicon films” [J. Appl. Phys. 90 , 1067 (2001)]

Brent A. Sperling, John R. Abelson
Journal: Journal of Applied Physics
J. Appl. Phys. 95, 2936 (2004)
https://doi.org/10.1063/1.1644628
Published: March 2004
View article titled, Comment on “Formation of nanocrystallites governed by the initial stress in the ultrathin hydrogenated amorphous silicon films” [J. Appl. Phys. 90 , 1067 (2001)]
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