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Journal Articles

Immersion ellipsometry for the uncorrelated determination of ultrathin film thickness and index of refraction: Theory and examples

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Samira Jafari, Blaine Johs, Matthew R. Linford
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053401 (2024)
https://doi.org/10.1116/6.0003511
Published: July 2024
View article titled, Immersion ellipsometry for the uncorrelated determination of ultrathin film thickness and index of refraction: Theory and examples
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Journal Articles

Ultrahigh purity conditions for nitride growth with low oxygen content by plasma-enhanced atomic layer deposition

Gilbert B. Rayner, Jr., Noel O’Toole, Jeffrey Shallenberger, Blaine Johs
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 062408 (2020)
https://doi.org/10.1116/6.0000454
Published: November 2020
View article titled, Ultrahigh purity conditions for nitride growth with low oxygen content by plasma-enhanced atomic layer deposition
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Journal Articles

Real-time in situ ellipsometric monitoring of aluminum nitride film growth via hollow-cathode plasma-assisted atomic layer deposition

Adnan Mohammad, Deepa Shukla, Saidjafarzoda Ilhom, Brian Willis, Blaine Johs, Ali Kemal Okyay, Necmi Biyikli
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 020927 (2019)
https://doi.org/10.1116/1.5085341
Published: February 2019
View article titled, Real-time <em>in situ</em> ellipsometric monitoring of aluminum nitride film growth via hollow-cathode plasma-assisted atomic layer deposition
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Includes: Supplementary data
Journal Articles

Substrate wobble compensation for in situ spectroscopic ellipsometry measurements

Blaine Johs, Ping He
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 03C111 (2011)
https://doi.org/10.1116/1.3555332
Published: February 2011
View article titled, Substrate wobble compensation for <em>in situ</em> spectroscopic ellipsometry measurements
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Journal Articles

Progress in spectroscopic ellipsometry: Applications from vacuum ultraviolet to infrared

James N. Hilfiker, Corey L Bungay, Ron A. Synowicki, Thomas E. Tiwald, Craig M. Herzinger, Blaine Johs, Greg K. Pribil, John A. Woollam
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 21, 1103–1108 (2003)
https://doi.org/10.1116/1.1569928
Published: June 2003
View article titled, Progress in spectroscopic ellipsometry: Applications from vacuum ultraviolet to infrared
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Journal Articles

Modeling AlxGa1−xAs optical constants as functions of composition

Paul G. Snyder, John A. Woollam, Samuel A. Alterovitz, Blaine Johs
Journal: Journal of Applied Physics
J. Appl. Phys. 68, 5925–5926 (1990)
https://doi.org/10.1063/1.346921
Published: December 1990
View article titled, Modeling Al<sub><em>x</em></sub>Ga<sub>1−<em>x</em></sub>As optical constants as functions of composition
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