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Babak Shokouhi
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Journal Articles

Cryogenic etching of positively tapered silicon pillars with controllable profiles

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Xiaoli Zhu, Aixi Pan, Babak Shokouhi, Bo Cui
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 032206 (2024)
https://doi.org/10.1116/6.0003372
Published: April 2024
View article titled, Cryogenic etching of positively tapered silicon pillars with controllable profiles
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Journal Articles

Multi-step plasma etching of high aspect ratio silicon nanostructures for metalens fabrication

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Xiaoli Zhu, Zihao Wang, Chenxu Zhu, Jiashi Shen, Babak Shokouhi, Huseyin Ekinci, Bo Cui
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 032203 (2024)
https://doi.org/10.1116/6.0003429
Published: April 2024
View article titled, Multi-step plasma etching of high aspect ratio silicon nanostructures for metalens fabrication
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Journal Articles

Tilted nanostructure fabrication by electron beam lithography

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Jian Zhang, Babak Shokouhi, Bo Cui
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06F302 (2012)
https://doi.org/10.1116/1.4754809
Published: September 2012
View article titled, Tilted nanostructure fabrication by electron beam lithography
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