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Journal Articles

Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering

Faezeh A. F. Lahiji, Samiran Bairagi, Roger Magnusson, Mauricio A. Sortica, Daniel Primetzhofer, Erik Ekström, Biplab Paul, Arnaud le Febvrier, Per Eklund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063402 (2023)
https://doi.org/10.1116/6.0002914
Published: September 2023
View article titled, Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering
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Includes: Supplementary data
Journal Articles

Low temperature epitaxial growth of Cantor-nitride thin films by magnetic field assisted magnetron sputtering

Smita G. Rao, Pascal Manuel Illgner, Robert Boyd, Gyula Nagy, Philippe Djemia, Daniel Primetzhofer, Ivan Petrov, Arnaud le Febvrier, Per Eklund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053415 (2023)
https://doi.org/10.1116/6.0002947
Published: August 2023
View article titled, Low temperature epitaxial growth of Cantor-nitride thin films by magnetic field assisted magnetron sputtering
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Includes: Supplementary data
Journal Articles

Effect of induced defects on conduction mechanisms of noble-gas-implanted ScN thin films

Razvan Burcea, Hugo Bouteiller, Simon Hurand, Per Eklund, Jean-François Barbot, Arnaud le Febvrier
Journal: Journal of Applied Physics
J. Appl. Phys. 134, 055107 (2023)
https://doi.org/10.1063/5.0137428
Published: August 2023
View article titled, Effect of induced defects on conduction mechanisms of noble-gas-implanted ScN thin films
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Journal Articles

Structural evolution and thermoelectric properties of Mg3SbxBi2−x thin films deposited by magnetron sputtering

Grzegorz Sadowski, Rui Shu, Arnaud le Febvrier, Zhijia Han, Denis Music, Weishu Liu, Per Eklund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043409 (2023)
https://doi.org/10.1116/6.0002635
Published: June 2023
View article titled, Structural evolution and thermoelectric properties of Mg<sub>3</sub>Sb<sub>x</sub>Bi<sub>2</sub><em><sub>−</sub></em><sub>x</sub> thin films deposited by magnetron sputtering
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Journal Articles

Effect of tilted closed-field magnetron design on the microstructure and mechanical properties of TiZrNbTaN coatings

Sanath Kumar Honnali, Charlotte Poterie, Arnaud le Febvrier, Daniel Lundin, Grzegorz Greczynski, Per Eklund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043402 (2023)
https://doi.org/10.1116/6.0002752
Published: May 2023
View article titled, Effect of tilted closed-field magnetron design on the microstructure and mechanical properties of TiZrNbTaN coatings
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Includes: Supplementary data
Journal Articles

Effects of alloying and deposition temperature on phase formation and superconducting properties of TiZrTaNb-based high entropy-alloy films

Rui Shu, Xiaofu Zhang, Smita G. Rao, Arnaud le Febvrier, Per Eklund
Journal: Applied Physics Letters
Appl. Phys. Lett. 120, 151901 (2022)
https://doi.org/10.1063/5.0091777
Published: April 2022
View article titled, Effects of alloying and deposition temperature on phase formation and superconducting properties of TiZrTaNb-based high entropy-alloy films
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Includes: Supplementary data
Journal Articles

Epitaxial growth and thermoelectric properties of Mg3Bi2 thin films deposited by magnetron sputtering

Grzegorz Sadowski, Yongbin Zhu, Rui Shu, Tao Feng, Arnaud le Febvrier, Denis Music, Weishu Liu, Per Eklund
Journal: Applied Physics Letters
Appl. Phys. Lett. 120, 051901 (2022)
https://doi.org/10.1063/5.0074419
Published: February 2022
View article titled, Epitaxial growth and thermoelectric properties of Mg<sub>3</sub>Bi<sub>2</sub> thin films deposited by magnetron sputtering
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Includes: Supplementary data
Journal Articles

Reduction of the thermal conductivity of the thermoelectric material ScN by Nb alloying

Nina Tureson, Ngo Van Nong, Daniele Fournier, Niraj Singh, Somnath Acharya, Susann Schmidt, Laurent Belliard, Ajay Soni, Arnaud le Febvrier, Per Eklund
Journal: Journal of Applied Physics
J. Appl. Phys. 122, 025116 (2017)
https://doi.org/10.1063/1.4993913
Published: July 2017
View article titled, Reduction of the thermal conductivity of the thermoelectric material ScN by Nb alloying
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Journal Articles

Wet-cleaning of MgO(001): Modification of surface chemistry and effects on thin film growth investigated by x-ray photoelectron spectroscopy and time-of-flight secondary ion mass spectroscopy

Arnaud Le Febvrier, Jens Jensen, Per Eklund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 021407 (2017)
https://doi.org/10.1116/1.4975595
Published: February 2017
View article titled, Wet-cleaning of MgO(001): Modification of surface chemistry and effects on thin film growth investigated by x-ray photoelectron spectroscopy and time-of-flight secondary ion mass spectroscopy
Open the PDF for Wet-cleaning of MgO(001): Modification of surface chemistry and effects on thin film growth investigated by x-ray photoelectron spectroscopy and time-of-flight secondary ion mass spectroscopy in another window