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Journal Articles

Influence of cryogenic dry etching on minority carriers lifetime in vertically aligned silicon nanostructures

Dmitry Kudryashov, Ivan Morozov, Alexander Gudovskikh, Alexander Uvarov, Konstantin Kotlyar, Alexey Lihachev, Alexei Nashchekin, Sergey Pavlov
Journal: AIP Conference Proceedings
AIP Conf. Proc. 2064, 030007 (2019)
https://doi.org/10.1063/1.5087669
Published: January 2019
View article titled, Influence of cryogenic dry etching on minority carriers lifetime in vertically aligned silicon nanostructures
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