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A. Shigetomi
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Journal Articles

High performance very large scale integrated photomask with a silicide film

Y. Watakabe, S. Matsuda, A. Shigetomi, M. Hirosue, T. Kato, H. Nakata
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 4, 841–844 (1986)
https://doi.org/10.1116/1.583523
Published: July 1986
View article titled, High performance very large scale integrated photomask with a silicide film
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Journal Articles

Evaluation of single crystal LaB6 cathodes

T. Kato, A. Shigetomi, Y. Watakabe, H. Hagiwara, H. Hiraoka
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 1, 100–106 (1983)
https://doi.org/10.1116/1.582529
Published: January 1983
View article titled, Evaluation of single crystal LaB<sub>6</sub> cathodes
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Journal Articles

Mask fabrication for VLSI using an electron beam exposure system

Y. Watakabe, T. Kato, A. Shigetomi, H. Morimoto
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 21, 1005–1011 (1982)
https://doi.org/10.1116/1.571852
Published: November 1982
View article titled, Mask fabrication for VLSI using an electron beam exposure system
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