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Journal Articles

The effect of the atomic incident angle upon the microstructure of thick beryllium deposits produced by physical vapor deposition

T. G. Nieh, R. F. Karlak, A. E. Vidoz
Journal: Journal of Vacuum Science and Technology
J. Vac. Sci. Technol. 21, 980–985 (1982)
https://doi.org/10.1116/1.571878
Published: November 1982
View article titled, The effect of the atomic incident angle upon the microstructure of thick beryllium deposits produced by physical vapor deposition
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