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Journal Articles

Fabrication of ultrashort sub-meter-radius x-ray mirrors using dynamic stencil deposition with figure correction

Takenori Shimamura, Yoko Takeo, Takashi Kimura, François Perrin, Amparo Vivo, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, Hidekazu Mimura

Rev. Sci. Instrum. 94, 043102 (2023)

https://doi.org/10.1063/5.0135367

Published: April 2023

View article titled, Fabrication of ultrashort sub-meter-radius x-ray mirrors using dynamic stencil deposition with figure correction

Journal Articles

Sharp, high numerical aperture (NA), nanoimprinted bare pyramid probe for optical mapping

Junze Zhou, Arian Gashi, Fabrizio Riminucci, Boyce Chang, Edward Barnard, Stefano Cabrini, Alexander Weber-Bargioni, Adam Schwartzberg, Keiko Munechika

Rev. Sci. Instrum. 94, 033902 (2023)

https://doi.org/10.1063/5.0104012

Published: March 2023

View article titled, Sharp, high numerical aperture (NA), nanoimprinted bare pyramid probe for optical mapping

Includes: Supplementary data

Journal Articles

A new approach of electrochemical etching fabrication based on drop-off-delay control

Sheng Yang, Weinan He, Can Li, Yuexia Han, Ning Gu

Rev. Sci. Instrum. 90, 074902 (2019)

https://doi.org/10.1063/1.5094470

Published: July 2019

View article titled, A new approach of electrochemical etching fabrication based on drop-off-delay control

Journal Articles

High-throughput atomic force microscopes operating in parallel

Hamed Sadeghian, Rodolf Herfst, Bert Dekker, Jasper Winters, Tom Bijnagte, Ramon Rijnbeek

Rev. Sci. Instrum. 88, 033703 (2017)

https://doi.org/10.1063/1.4978285

Published: March 2017

View article titled, High-throughput atomic force microscopes operating in parallel

Journal Articles

Note: Experimental observation of nano-channel pattern in light sheet laser interference nanolithography system

Kavya Mohan, Partha Pratim Mondal

Rev. Sci. Instrum. 87, 066107 (2016)

https://doi.org/10.1063/1.4954198

Published: June 2016

View article titled, Note: Experimental observation of nano-channel pattern in light sheet laser interference nanolithography system

Journal Articles

A variable-temperature nanostencil compatible with a low-temperature scanning tunneling microscope/atomic force microscope

Wolfram Steurer, Leo Gross, Reto R. Schlittler, Gerhard Meyer

Rev. Sci. Instrum. 85, 023706 (2014)

https://doi.org/10.1063/1.4864296

Published: February 2014

View article titled, A variable-temperature nanostencil compatible with a low-temperature scanning tunneling microscope/atomic force microscope

Journal Articles

Qplus AFM driven nanostencil

B. Grévin, M. Fakir, J. Hayton, M. Brun, R. Demadrille, J. Faure-Vincent

Rev. Sci. Instrum. 82, 063706 (2011)

https://doi.org/10.1063/1.3600898

Published: June 2011

View article titled, Qplus AFM driven nanostencil

Journal Articles

Atomic force microscopy imaging using a tip-on-chip: Opening the door to integrated near field nanotools

J. Hayton, J. Polesel-Maris, R. Demadrille, M. Brun, F. Thoyer, C. Lubin, J. Cousty, B. Grévin

Rev. Sci. Instrum. 81, 093707 (2010)

https://doi.org/10.1063/1.3477996

Published: September 2010

View article titled, Atomic force microscopy imaging using a tip-on-chip: Opening the door to integrated near field nanotools

Journal Articles

Development of UHV dynamic nanostencil for surface patterning

Haiming Guo, David Martrou, Tomaso Zambelli, Erik Dujardin, Sébastien Gauthier

Rev. Sci. Instrum. 79, 103904 (2008)

https://doi.org/10.1063/1.2999547

Published: October 2008

View article titled, Development of UHV dynamic nanostencil for surface patterning

Journal Articles

All-in-one static and dynamic nanostencil atomic force microscopy/scanning tunneling microscopy system

Percy Zahl, Martin Bammerlin, Gerhard Meyer, Reto R. Schlittler

Rev. Sci. Instrum. 76, 023707 (2005)

https://doi.org/10.1063/1.1852925

Published: January 2005

View article titled, All-in-one static and dynamic nanostencil atomic force microscopy/scanning tunneling microscopy system

Journal Articles

Data coding tools for color-coded vector nanolithography

Janusz Lekki, Saveen Kumar, Sunil S. Parihar, Sebastien Grange, Charles Baur, Raphael Foschia, Andrzej Kulik

Rev. Sci. Instrum. 75, 4646–4650 (2004)

https://doi.org/10.1063/1.1805014

Published: November 2004

View article titled, Data coding tools for color-coded vector nanolithography

Journal Articles

Solid state microcavity dye lasers fabricated by nanoimprint lithography

D. Nilsson, T. Nielsen, A. Kristensen

Rev. Sci. Instrum. 75, 4481–4486 (2004)

https://doi.org/10.1063/1.1794411

Published: October 2004

View article titled, Solid state microcavity dye lasers fabricated by nanoimprint lithography

Journal Articles

Current status of the Synchrotron Radiation Center

Rev. Sci. Instrum. 73, 1677–1679 (2002)

https://doi.org/10.1063/1.1425390

Published: March 2002

View article titled, Current status of the Synchrotron Radiation Center

Journal Articles

Nanometer-scale patterning and individual current-controlled lithography using multiple scanning probes

Kathryn Wilder, Hyongsok T. Soh, Abdullah Atalar, Calvin F. Quate

Rev. Sci. Instrum. 70, 2822–2827 (1999)

https://doi.org/10.1063/1.1149802

Published: June 1999

View article titled, Nanometer-scale patterning and individual current-controlled lithography using multiple scanning probes

Journal Articles

Radio frequency driven multicusp sources (invited)

Ka-Ngo Leung

Rev. Sci. Instrum. 69, 998–1002 (1998)

https://doi.org/10.1063/1.1148705

Published: February 1998

View article titled, Radio frequency driven multicusp sources (invited)

Journal Articles

Surface plasma source to generate high‐brightness H⁻ beams for ion projection lithography^a)

V. G. Dudnikov, G. E. Derevyankin, D. V. Kovalevsky, V. Ya. Savkin, E. A. Sokolovsky, S. K. Guharay

Rev. Sci. Instrum. 67, 1614–1617 (1996)

https://doi.org/10.1063/1.1146897

Published: April 1996

View article titled, Surface plasma source to generate high‐brightness H− beams for ion projection lithographya)

Journal Articles

Surface plasma source to generate high‐brightness H⁻ beams for ion projection lithography (abstract)^a)

V. G. Dudnikov, G. E. Derevyankin, D. V. Kovalevsky, V. Ya. Savkin, E. A. Sokolovsky, S. K. Guharay

Rev. Sci. Instrum. 67, 927 (1996)

https://doi.org/10.1063/1.1147227

Published: March 1996

View article titled, Surface plasma source to generate high‐brightness H− beams for ion projection lithography (abstract)a)

Journal Articles

H⁻ beam based projection microlithography: A conceptual study of the beam parameters^a)

S. K. Guharay, M. Reiser, V. G. Dudnikov

Rev. Sci. Instrum. 65, 1745–1748 (1994)

https://doi.org/10.1063/1.1144870

Published: May 1994

View article titled, H− beam based projection microlithography: A conceptual study of the beam parametersa)

Journal Articles

H⁻ beam based projection microlithography: A conceptual study of the beam parameters (abstract)^a)

S. K. Guharay, M. Reiser, V. G. Dudnikov

Rev. Sci. Instrum. 65, 1310 (1994)

https://doi.org/10.1063/1.1144989

Published: April 1994

View article titled, H− beam based projection microlithography: A conceptual study of the beam parameters (abstract)a)

NARROW

Topics

Fabrication of ultrashort sub-meter-radius x-ray mirrors using dynamic stencil deposition with figure correction

Sharp, high numerical aperture (NA), nanoimprinted bare pyramid probe for optical mapping

A new approach of electrochemical etching fabrication based on drop-off-delay control

High-throughput atomic force microscopes operating in parallel

Note: Experimental observation of nano-channel pattern in light sheet laser interference nanolithography system

A variable-temperature nanostencil compatible with a low-temperature scanning tunneling microscope/atomic force microscope

Qplus AFM driven nanostencil

Atomic force microscopy imaging using a tip-on-chip: Opening the door to integrated near field nanotools

Development of UHV dynamic nanostencil for surface patterning

All-in-one static and dynamic nanostencil atomic force microscopy/scanning tunneling microscopy system

Data coding tools for color-coded vector nanolithography

Solid state microcavity dye lasers fabricated by nanoimprint lithography

Current status of the Synchrotron Radiation Center

Nanometer-scale patterning and individual current-controlled lithography using multiple scanning probes

Radio frequency driven multicusp sources (invited)

Surface plasma source to generate high‐brightness H⁻ beams for ion projection lithography^a)

Surface plasma source to generate high‐brightness H⁻ beams for ion projection lithography (abstract)^a)

H⁻ beam based projection microlithography: A conceptual study of the beam parameters^a)

H⁻ beam based projection microlithography: A conceptual study of the beam parameters (abstract)^a)

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