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Journal Articles
Journal:
Review of Scientific Instruments
Rev. Sci. Instrum. 94, 103702 (2023)
Published: October 2023
Includes: Supplementary data
Journal Articles
Ekaterina Kneschaurek, Alexander Hinderhofer, Bernd Hofferberth, Niels Scheffczyk, Linus Pithan, Paul Zimmermann, Lena Merten, Florian Bertram, Frank Schreiber
Journal:
Review of Scientific Instruments
Rev. Sci. Instrum. 94, 063901 (2023)
Published: June 2023
Journal Articles
Journal:
Review of Scientific Instruments
Rev. Sci. Instrum. 93, 103306 (2022)
Published: October 2022
Journal Articles
Journal:
Review of Scientific Instruments
Rev. Sci. Instrum. 93, 024504 (2022)
Published: February 2022
Journal Articles
Journal:
Review of Scientific Instruments
Rev. Sci. Instrum. 89, 123114 (2018)
Published: December 2018
Journal Articles
Journal:
Review of Scientific Instruments
Rev. Sci. Instrum. 88, 033104 (2017)
Published: March 2017
Journal Articles
Journal:
Review of Scientific Instruments
Rev. Sci. Instrum. 87, 123112 (2016)
Published: December 2016
Journal Articles
Real-time dielectric-film thickness measurement system for plasma processing chamber wall monitoring
Journal:
Review of Scientific Instruments
Rev. Sci. Instrum. 86, 123502 (2015)
Published: December 2015
Journal Articles
Journal:
Review of Scientific Instruments
Rev. Sci. Instrum. 86, 113108 (2015)
Published: November 2015
Journal Articles
Journal:
Review of Scientific Instruments
Rev. Sci. Instrum. 83, 103904 (2012)
Published: October 2012
Journal Articles
Journal:
Review of Scientific Instruments
Rev. Sci. Instrum. 80, 046107 (2009)
Published: April 2009
Includes: Supplementary data
Journal Articles