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Journal Articles

A versatile setup for hydrogen isotope permeation studies

P. Sand, A. Manhard, U. von Toussaint

Rev. Sci. Instrum. 95, 123302 (2024)

https://doi.org/10.1063/5.0239583

Published: December 2024

View articletitled, A versatile setup for hydrogen isotope permeation studies

Journal Articles

Development of a 50 kV hydrogen–helium mixed ion beam implanter

W. Huang, S. X. Cai, L. Wang, Y. K. Su, K. Zhu

Rev. Sci. Instrum. 95, 043303 (2024)

https://doi.org/10.1063/5.0200849

Published: April 2024

View articletitled, Development of a 50 kV hydrogen–helium mixed ion beam implanter

Journal Articles

Laser temperature programmed desorption: A flexible technique to study ion-surface interaction

M. Minissale, A. Dunand, P. Hiret, J.-B. Faure, C. Grisolia, T. Angot, L. Gallais, R. Bisson

Rev. Sci. Instrum. 95, 033004 (2024)

https://doi.org/10.1063/5.0186019

Published: March 2024

View articletitled, Laser temperature programmed desorption: A flexible technique to study ion-surface interaction

Journal Articles

Nanoscale multiply charged focused ion beam platform for surface modification, implantation, and analysis

Mathieu Lalande, Pierre Salou, Arnaud Houel, Thierry Been, Thierry Birou, Charles Bourin, Amine Cassimi, Arthur Keizer, Jean-Baptiste Mellier, Jean-Marc Ramillon, Anthony Sineau, Anne Delobbe, Stéphane Guillous

Rev. Sci. Instrum. 93, 043703 (2022)

https://doi.org/10.1063/5.0078914

Published: April 2022

View articletitled, Nanoscale multiply charged focused ion beam platform for surface modification, implantation, and analysis

Journal Articles

Improvement of the far-infrared optical property for glasses by plasma-assisted dispersion of fluorocarbon species into the shallow surface

Kiminori Sato, Kenji Ito

Rev. Sci. Instrum. 92, 063905 (2021)

https://doi.org/10.1063/5.0046936

Published: June 2021

View articletitled, Improvement of the far-infrared optical property for glasses by plasma-assisted dispersion of fluorocarbon species into the shallow surface

Journal Articles

Design and development of a compact ion implanter and plasma diagnosis facility based on a 2.45 GHz microwave ion source

Ram Swaroop, Narender Kumar, G. Rodrigues, D. Kanjilal, I. Banerjee, S. K. Mahapatra

Rev. Sci. Instrum. 92, 053306 (2021)

https://doi.org/10.1063/5.0029629

Published: May 2021

View articletitled, Design and development of a compact ion implanter and plasma diagnosis facility based on a 2.45 GHz microwave ion source

Journal Articles

Re v i e w of Scientific Instruments New Products

Andreas Mandelis

Rev. Sci. Instrum. 92, 019502 (2021)

https://doi.org/10.1063/5.0042462

Published: January 2021

View articletitled, Re v i e w of Scientific Instruments New Products

Journal Articles

Annealing studies combined with low temperature emission Mössbauer spectroscopy of short-lived parent isotopes: Determination of local Debye–Waller factors

H. P. Gunnlaugsson, H. Masenda, T. E. Mølholt, K. Bharuth-Ram, S. Ólafsson, K. Johnston, J. Schell, H. P. Gislason, P. B. Krastev, R. Mantovan, D. Naidoo, B. Qi, I. Unzueta

Rev. Sci. Instrum. 92, 013901 (2021)

https://doi.org/10.1063/5.0020951

Published: January 2021

View articletitled, Annealing studies combined with low temperature emission Mössbauer spectroscopy of short-lived parent isotopes: Determination of local Debye–Waller factors

Journal Articles

Review of Scientific Instruments New Products

Andreas Mandelis

Rev. Sci. Instrum. 91, 129501 (2020)

https://doi.org/10.1063/5.0038767

Published: December 2020

View articletitled, Review of Scientific Instruments New Products

Journal Articles

A miniaturized ECR plasma flood gun for wafer charge neutralization

Yaoxiang Jiang, Shixiang Peng, Wenbin Wu, Tenghao Ma, Jingfeng Zhang, Haitao Ren, Kai Li, Tao Zhang, Jiamei Wen, Yuan Xu, AiLin Zhang, Jiang Sun, Zhiyu Guo, Jia’er Chen

Rev. Sci. Instrum. 91, 033319 (2020)

https://doi.org/10.1063/1.5128522

Published: March 2020

View articletitled, A miniaturized ECR plasma flood gun for wafer charge neutralization

Journal Articles

Investigation of the time interval of plasma generation for a high repetition rate laser ion source

H. Kashiwagi, K. Yamada

Rev. Sci. Instrum. 91, 033305 (2020)

https://doi.org/10.1063/1.5130999

Published: March 2020

View articletitled, Investigation of the time interval of plasma generation for a high repetition rate laser ion source

Journal Articles

A compact electron cyclotron resonance negative hydrogen ion source for evaluation of plasma electrode materials

Takayuki Eguchi, Mamiko Sasao, Yuji Shimabukuro, Fumiya Ikemoto, Masashi Kisaki, Haruhisa Nakano, Katsuyoshi Tsumori, Motoi Wada

Rev. Sci. Instrum. 91, 013508 (2020)

https://doi.org/10.1063/1.5128610

Published: January 2020

View articletitled, A compact electron cyclotron resonance negative hydrogen ion source for evaluation of plasma electrode materials

Journal Articles

Low-charge-state ion production by a laser ion source for the TIARA ion implanter

K. Yamada, H. Kashiwagi

Rev. Sci. Instrum. 91, 013305 (2020)

https://doi.org/10.1063/1.5128570

Published: January 2020

View articletitled, Low-charge-state ion production by a laser ion source for the TIARA ion implanter

Journal Articles

The vacuum arc ion source for indium and tin ions implantation into phase change memory thin films

Dmitry Seleznev, Alexander Kozlov, Timur Kulevoy, Alexey Sitnikov, Petr Lazarenko, Yuri Vorobyov, Mikhail Smayev, Alexey Yakubov, Alexey Sherchenkov, Sergey Kozyukhin

Rev. Sci. Instrum. 90, 123313 (2019)

https://doi.org/10.1063/1.5128561

Published: December 2019

View articletitled, The vacuum arc ion source for indium and tin ions implantation into phase change memory thin films

Journal Articles

A new fast time of flight detector for single ion counting to high flux radioactive beams at ISOLDE

S. Warren, T. Giles, C. M. Pequeno, A. Ringvall-Moberg

Rev. Sci. Instrum. 90, 103313 (2019)

https://doi.org/10.1063/1.5122715

Published: October 2019

View articletitled, A new fast time of flight detector for single ion counting to high flux radioactive beams at ISOLDE

Journal Articles

²⁸Si⁺ ion beams from Penning ion source based implanter systems for near-surface isotopic purification of silicon

Holger Fiedler, Prasanth Gupta, John Kennedy, Andreas Markwitz

Rev. Sci. Instrum. 89, 123305 (2018)

https://doi.org/10.1063/1.5048949

Published: December 2018

View articletitled, 28Si+ ion beams from Penning ion source based implanter systems for near-surface isotopic purification of silicon

Includes: Supplementary data

Journal Articles

Implantation of defined activities of phosphorus 32 with reduced target damage

Daniel Heesch, Detlef Rogalla, Thomas Lenders, Jan Meijer, Patrick Happel

Rev. Sci. Instrum. 89, 113304 (2018)

https://doi.org/10.1063/1.5019014

Published: November 2018

View articletitled, Implantation of defined activities of phosphorus 32 with reduced target damage

Journal Articles

SIESTA: A high current ion source for erosion and retention studies

R. Arredondo, M. Oberkofler, K. Schmid, T. Schwarz-Selinger, W. Jacob, R. Neu

Rev. Sci. Instrum. 89, 103501 (2018)

https://doi.org/10.1063/1.5039156

Published: October 2018

View articletitled, SIESTA: A high current ion source for erosion and retention studies

Includes: Supplementary data

Journal Articles

Radioactive ion beams of ¹¹¹In using ECR plasma sputtering method

Vaishali Naik, Mahuwa Bhattacharjee, D. Lavanya Kumar, Prasanta Karmakar, S. K. Das, Debashis Banerjee, Sankha Chattopadhyay, Luna Barua, Sujata Saha Das, Asit Kumar Pal, Arup Bandyopadhyay, Alok Chakrabarti

Rev. Sci. Instrum. 88, 063308 (2017)

https://doi.org/10.1063/1.4985638

Published: June 2017

View articletitled, Radioactive ion beams of 111In using ECR plasma sputtering method

Journal Articles

A single-step lithography system based on an enhanced robotic adhesive dispenser

Jiyao Xing, Weibin Rong, Ding Sun, Lefeng Wang, Lining Sun

Rev. Sci. Instrum. 87, 095005 (2016)

https://doi.org/10.1063/1.4963357

Published: September 2016

View articletitled, A single-step lithography system based on an enhanced robotic adhesive dispenser

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A versatile setup for hydrogen isotope permeation studies

Development of a 50 kV hydrogen–helium mixed ion beam implanter

Laser temperature programmed desorption: A flexible technique to study ion-surface interaction

Nanoscale multiply charged focused ion beam platform for surface modification, implantation, and analysis

Improvement of the far-infrared optical property for glasses by plasma-assisted dispersion of fluorocarbon species into the shallow surface

Design and development of a compact ion implanter and plasma diagnosis facility based on a 2.45 GHz microwave ion source

Re v i e w of Scientific Instruments New Products

Annealing studies combined with low temperature emission Mössbauer spectroscopy of short-lived parent isotopes: Determination of local Debye–Waller factors

Review of Scientific Instruments New Products

A miniaturized ECR plasma flood gun for wafer charge neutralization

Investigation of the time interval of plasma generation for a high repetition rate laser ion source

A compact electron cyclotron resonance negative hydrogen ion source for evaluation of plasma electrode materials

Low-charge-state ion production by a laser ion source for the TIARA ion implanter

The vacuum arc ion source for indium and tin ions implantation into phase change memory thin films

A new fast time of flight detector for single ion counting to high flux radioactive beams at ISOLDE

²⁸Si⁺ ion beams from Penning ion source based implanter systems for near-surface isotopic purification of silicon

Implantation of defined activities of phosphorus 32 with reduced target damage

SIESTA: A high current ion source for erosion and retention studies

Radioactive ion beams of ¹¹¹In using ECR plasma sputtering method

A single-step lithography system based on an enhanced robotic adhesive dispenser

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