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Journal Articles

A hard mask process and alignment device aims to achieve high consistency and mass-scale production of gas sensors based on spraying hydrothermal gas sensing material

YanKun Tang, Penghui Lai, Zongxin Hu, Yu Luo, Hairong Wang, Lingmin Yu
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 94, 105005 (2023)
https://doi.org/10.1063/5.0155416
Published: October 2023
View article titled, A hard mask process and alignment device aims to achieve high consistency and mass-scale production of gas sensors based on spraying hydrothermal gas sensing material
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Journal Articles

Fast and high-yield fabrication of axially symmetric ion-trap needle electrodes via two step electrochemical etching

Nikhil Kotibhaskar, Noah Greenberg, Sainath Motlakunta, Chung-You Shih, Rajibul Islam
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 94, 033201 (2023)
https://doi.org/10.1063/5.0108425
Published: March 2023
View article titled, Fast and high-yield fabrication of axially symmetric ion-trap needle electrodes via two step electrochemical etching
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Includes: Supplementary data
Journal Articles

Optical interference on the measurement of film-depth-dependent light absorption spectroscopy and a correction approach

Guanyu Lu, Zichao Shen, Hong Wang, Laju Bu, Guanghao Lu
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 94, 023907 (2023)
https://doi.org/10.1063/5.0138336
Published: February 2023
View article titled, Optical interference on the measurement of film-depth-dependent light absorption spectroscopy and a correction approach
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Includes: Supplementary data
Journal Articles

Design and fabrication of diffraction grating with optimized efficiency for transient grating spectroscopy

Shubin Huang, Zeyu Peng, Shi Rui, Renfu Zhang, Rui-Tao Wen, Xing Cheng, Liang Guo
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 93, 125112 (2022)
https://doi.org/10.1063/5.0116176
Published: December 2022
View article titled, Design and fabrication of diffraction grating with optimized efficiency for transient grating spectroscopy
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Includes: Supplementary data
Journal Articles

Fabrication of tungsten tips with controllable shape by a two-step rapid reciprocating electrochemical etching method

Yiming Sun, Hanwen Deng, Xinyu Liu, Xiaoming Kang
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 93, 123304 (2022)
https://doi.org/10.1063/5.0124438
Published: December 2022
View article titled, Fabrication of tungsten tips with controllable shape by a two-step rapid reciprocating electrochemical etching method
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Journal Articles

Spectroscopic depth profilometry of organic thin films upon inductively coupled plasma etching

Yifan Xing, Nan Qiao, Jinde Yu, Meng Zhang, Junpeng Dai, Tingting Niu, Yuheng Wang, Yuanwei Zhu, Laju Bu, Guanghao Lu
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 93, 073903 (2022)
https://doi.org/10.1063/5.0088718
Published: July 2022
View article titled, Spectroscopic depth profilometry of organic thin films upon inductively coupled plasma etching
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Includes: Supplementary data
Journal Articles

Ion beam figuring with focused anode layer thruster

O. I. Girka, K. I. Lee, Y. S. Choi, S. O. Jang
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 93, 063304 (2022)
https://doi.org/10.1063/5.0071800
Published: June 2022
View article titled, Ion beam figuring with focused anode layer thruster
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Journal Articles

Overload performance study and fabrication of the capacitive pressure-sensitive chip with linkage film

Rongyan Chuai, Yuxin Yang, Bing Zhang, Guimin Jiang, He Zhang
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 93, 015007 (2022)
https://doi.org/10.1063/5.0078492
Published: January 2022
View article titled, Overload performance study and fabrication of the capacitive pressure-sensitive chip with linkage film
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Journal Articles

High-throughput deterministic plasma etching using array-type plasma generator system

Yasuhisa Sano, Ken Nishida, Ryohei Asada, Shinya Okayama, Daisetsu Toh, Satoshi Matsuyama, Kazuto Yamauchi
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 92, 125107 (2021)
https://doi.org/10.1063/5.0071623
Published: December 2021
View article titled, High-throughput deterministic plasma etching using array-type plasma generator system
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Journal Articles

An atomic hydrogen etching sensor for H2 plasma diagnostics

D. P. J. van Leuken, C. A. de Meijere, R. van der Horst, V. Y. Banine, E. A. Osorio, J. Beckers
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 92, 063518 (2021)
https://doi.org/10.1063/5.0033518
Published: June 2021
View article titled, An atomic hydrogen etching sensor for H<sub>2</sub> plasma diagnostics
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Journal Articles

Multimodal real-time frequency tracking of cantilever arrays in liquid environment for biodetection: Comprehensive setup and performance analysis

Annalisa De Pastina, Francesco Padovani, Giulio Brunetti, Chiara Rotella, Fabio Niosi, Victor Usov, Martin Hegner
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 92, 065001 (2021)
https://doi.org/10.1063/5.0047631
Published: June 2021
View article titled, Multimodal real-time frequency tracking of cantilever arrays in liquid environment for biodetection: Comprehensive setup and performance analysis
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Includes: Supplementary data
Journal Articles

Anisotropic thermal conductivity measurement of organic thin film with bidirectional 3ω method

Shingi Yamaguchi, Takuma Shiga, Shun Ishioka, Tsuguyuki Saito, Takashi Kodama, Junichiro Shiomi
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 92, 034902 (2021)
https://doi.org/10.1063/5.0030982
Published: March 2021
View article titled, Anisotropic thermal conductivity measurement of organic thin film with bidirectional 3<em>ω</em> method
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Includes: Supplementary data
Journal Articles

Temperature-insensitive hybrid interferometric liquid refractive index sensor

Lijun Li, Fengjuan Wei, Tianzong Xu, Qian Ma, Min Li, Zhaochun Zhang
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 92, 025003 (2021)
https://doi.org/10.1063/5.0030240
Published: February 2021
View article titled, Temperature-insensitive hybrid interferometric liquid refractive index sensor
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Journal Articles

Systematic electrochemical etching of various metal tips for tunneling spectroscopy and scanning probe microscopy

Jiawei Zhang, Pinyuan Wang, Xuao Zhang, Haoran Ji, Jiawei Luo, He Wang, Jian Wang
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 92, 015124 (2021)
https://doi.org/10.1063/5.0011896
Published: January 2021
View article titled, Systematic electrochemical etching of various metal tips for tunneling spectroscopy and scanning probe microscopy
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Includes: Supplementary data
Journal Articles

Anti-contamination SMART (Spectrum Monitoring Apparatus with Roll-to-roll Transparent film) window for optical diagnostics of plasma systems

Jongyoon Kim, Kang-Il Lee, Hyun-Young Jeong, Ji-Hoon Lee, Yong Sup Choi
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 92, 013507 (2021)
https://doi.org/10.1063/5.0031869
Published: January 2021
View article titled, Anti-contamination SMART (Spectrum Monitoring Apparatus with Roll-to-roll Transparent film) window for optical diagnostics of plasma systems
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Journal Articles

A novel electrochemical anodization cell for the synthesis of mesoporous silicon

N. Gostkowska-Lekner, D. Wallacher, N. Grimm, K. Habicht, T. Hofmann
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 91, 105113 (2020)
https://doi.org/10.1063/5.0008536
Published: October 2020
View article titled, A novel electrochemical anodization cell for the synthesis of mesoporous silicon
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Journal Articles

An integrated packaged resonant accelerometer with temperature compensation

Bo Li, Cun Li, Yulong Zhao, Chao Han, Quanwei Zhang
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 91, 105004 (2020)
https://doi.org/10.1063/5.0006147
Published: October 2020
View article titled, An integrated packaged resonant accelerometer with temperature compensation
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Journal Articles

An abrasive-free chemical polishing method assisted by nickel catalyst generated by in situ electrochemical plating

Daisetsu Toh, Pho Van Bui, Ai Isohashi, Satoshi Matsuyama, Kazuto Yamauchi, Yasuhisa Sano
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 91, 045108 (2020)
https://doi.org/10.1063/1.5141381
Published: April 2020
View article titled, An abrasive-free chemical polishing method assisted by nickel catalyst generated by <em>in situ</em> electrochemical plating
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Journal Articles

Fabrication of Fe-based metal glass microelectrodes by a vertical liquid membrane electrochemical etching method

Xiujuan Wu, Yumeng Sang, Tao Yang, Yongbin Zeng
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 91, 035109 (2020)
https://doi.org/10.1063/1.5142702
Published: March 2020
View article titled, Fabrication of Fe-based metal glass microelectrodes by a vertical liquid membrane electrochemical etching method
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Journal Articles

A facile fabrication procedure for platinum nanoprobes with high-aspect-ratio and low tip radii via electrochemical etching

J. Zhang, Y. Gonzalez, R. Sany, A. Ruediger
Journal: Review of Scientific Instruments
Rev. Sci. Instrum. 91, 033702 (2020)
https://doi.org/10.1063/1.5128653
Published: March 2020
View article titled, A facile fabrication procedure for platinum nanoprobes with high-aspect-ratio and low tip radii via electrochemical etching
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