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Journal Articles

Spontaneous plasma formation via electrical explosion of nanostructured metal surface layers in plasma–surface interactions

M. M. Tsventoukh
Journal: Physics of Plasmas
Phys. Plasmas 30, 092511 (2023)
https://doi.org/10.1063/5.0158993
Published: September 2023
View article titled, Spontaneous plasma formation via electrical explosion of nanostructured metal surface layers in plasma–surface interactions
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Journal Articles

Announcement: The 2022 James Clerk Maxwell Prize for Plasma Physics

Michael E. Mauel
Journal: Physics of Plasmas
Phys. Plasmas 30, 080201 (2023)
https://doi.org/10.1063/5.0166683
Published: August 2023
View article titled, Announcement: The 2022 James Clerk Maxwell Prize for Plasma Physics
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Journal Articles

Spatial flux and energy asymmetry in a low pressure capacitively coupled plasma discharge excited by sawtooth waveform: A harmonic study

Sarveshwar Sharma, Nishant Sirse, Miles M Turner
Journal: Physics of Plasmas
Phys. Plasmas 30, 073506 (2023)
https://doi.org/10.1063/5.0151866
Published: July 2023
View article titled, Spatial flux and energy asymmetry in a low pressure capacitively coupled plasma discharge excited by sawtooth waveform: A harmonic study
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Journal Articles

Experimental investigation on “glow flow” phenomenon during current-zero period between transverse magnetic contacts

Yuzi Jiang, Shixin Xiu, Leming Wei, Shiqi Liu, Yu Yang, Meiqin Guo
Journal: Physics of Plasmas
Phys. Plasmas 30, 063501 (2023)
https://doi.org/10.1063/5.0149412
Published: June 2023
View article titled, Experimental investigation on “glow flow” phenomenon during current-zero period between transverse magnetic contacts
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Journal Articles

Enhanced water activation in gas–liquid two-phase flow using air plasma droplets

Han Xu, Hancheng Xu, Yihong Huang, Zipeng Wei, Hao Zhang, Mingxu Shao, Kai Xie
Journal: Physics of Plasmas
Phys. Plasmas 30, 053504 (2023)
https://doi.org/10.1063/5.0145972
Published: May 2023
View article titled, Enhanced water activation in gas–liquid two-phase flow using air plasma droplets
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Journal Articles

Physics and instabilities of low-temperature E  ×  B plasmas for spacecraft propulsion and other applications

Jean-Pierre Boeuf, Andrei Smolyakov
Journal: Physics of Plasmas
Phys. Plasmas 30, 050901 (2023)
https://doi.org/10.1063/5.0145536
Published: May 2023
View article titled, Physics and instabilities of low-temperature <em>E</em>  ×  <em>B</em> plasmas for spacecraft propulsion and other applications
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Journal Articles

Broadband microwave absorption effects in 2D nitrogen capacitively coupled plasma under different operating conditions

Wenchong Ouyang, Qi Liu, Chengbiao Ding, Zhengwei Wu
Journal: Physics of Plasmas
Phys. Plasmas 30, 043501 (2023)
https://doi.org/10.1063/5.0128430
Published: April 2023
View article titled, Broadband microwave absorption effects in 2D nitrogen capacitively coupled plasma under different operating conditions
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Journal Articles

Investigation of the spatial distribution characteristics of multiple species in a vacuum arc

Xiaolong Huang, Shangyu Yang, Zhiyun Wu, Haibo Su, Lihua Zhao, Wenjun Ning, Shenli Jia
Journal: Physics of Plasmas
Phys. Plasmas 30, 033903 (2023)
https://doi.org/10.1063/5.0127802
Published: March 2023
View article titled, Investigation of the spatial distribution characteristics of multiple species in a vacuum arc
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Journal Articles

First self-consistent simulations of trapped electron clouds in a gyrotron gun and comparison with experiments

G. Le Bars, J. Loizu, J.-Ph. Hogge, S. Alberti, F. Romano, J. Genoud, I. G. Pagonakis
Journal: Physics of Plasmas
Phys. Plasmas 30, 030702 (2023)
https://doi.org/10.1063/5.0136340
Published: March 2023
View article titled, First self-consistent simulations of trapped electron clouds in a gyrotron gun and comparison with experiments
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Journal Articles

Electron-assisted PR etching in oxygen inductively coupled plasma via a low-energy electron beam

Jiwon Jung, Min-Seok Kim, Junyoung Park, Chang-Min Lim, Tae-Wung Hwang, Beom-Jun Seo, Chin-Wook Chung
Journal: Physics of Plasmas
Phys. Plasmas 30, 023504 (2023)
https://doi.org/10.1063/5.0131389
Published: February 2023
View article titled, Electron-assisted PR etching in oxygen inductively coupled plasma via a low-energy electron beam
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Journal Articles

A method for measuring electron temperature and ion density with immunity to RF fluctuation and ion current

Hyundong Eo, Kyung-Hyun Kim, Moo-Young Lee, Ju Ho Kim, Chin-Wook Chung
Journal: Physics of Plasmas
Phys. Plasmas 30, 023501 (2023)
https://doi.org/10.1063/5.0099209
Published: February 2023
View article titled, A method for measuring electron temperature and ion density with immunity to RF fluctuation and ion current
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Journal Articles

Asynchronous pulse-modulated plasma effect on the generation of abnormal high-energetic electrons for the suppression of charge-up induced tilting and cell density-dependent etching profile variation

Hyoungcheol Kwon, Felipe Iza, Imhee Won, Minkyung Lee, Songhee Han, Raseong Park, Yongjin Kim, Dongyean Oh, Sung-Kye Park, Seonyong Cha
Journal: Physics of Plasmas
Phys. Plasmas 30, 013504 (2023)
https://doi.org/10.1063/5.0126786
Published: January 2023
View article titled, Asynchronous pulse-modulated plasma effect on the generation of abnormal high-energetic electrons for the suppression of charge-up induced tilting and cell density-dependent etching profile variation
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Journal Articles

Creation of solitons and density cavities by lower hybrid waves

H. Saleem, Shaukat Ali Shan
Journal: Physics of Plasmas
Phys. Plasmas 29, 122101 (2022)
https://doi.org/10.1063/5.0123370
Published: December 2022
View article titled, Creation of solitons and density cavities by lower hybrid waves
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Journal Articles

The features of surface charging on rectangle mask holes in plasma etching

Peng Zhang, Dengmei Li
Journal: Physics of Plasmas
Phys. Plasmas 29, 103506 (2022)
https://doi.org/10.1063/5.0118581
Published: October 2022
View article titled, The features of surface charging on rectangle mask holes in plasma etching
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Journal Articles

Operating regimes of a constricted arc discharge in a forevacuum-pressure, plasma-cathode electron source of pulsed large-radius electron beams

Andrey V. Kazakov, Efim M. Oks, Nikolay A. Panchenko
Journal: Physics of Plasmas
Phys. Plasmas 29, 103108 (2022)
https://doi.org/10.1063/5.0102810
Published: October 2022
View article titled, Operating regimes of a constricted arc discharge in a forevacuum-pressure, plasma-cathode electron source of pulsed large-radius electron beams
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Journal Articles

Electron–N2 interactions in RF E × B fields

Miroslav M. Ristić, Violeta V. Stanković, Mirjana M. Vojnović, Goran B. Poparić
Journal: Physics of Plasmas
Phys. Plasmas 29, 093512 (2022)
https://doi.org/10.1063/5.0101931
Published: September 2022
View article titled, Electron–N<sub>2</sub> interactions in RF E × B fields
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Journal Articles

Effect of heavy inert ion strikes on cell density-dependent profile variation and distortion during the etching process for high-aspect ratio features

Hyoungcheol Kwon, Imhee Won, Songhee Han, Dong-Hun Yu, Deuk-Chul Kwon, Yeon Ho Im, Felipe Iza, Dongyean Oh, Sung-Kye Park, Seonyong Cha
Journal: Physics of Plasmas
Phys. Plasmas 29, 093510 (2022)
https://doi.org/10.1063/5.0101106
Published: September 2022
View article titled, Effect of heavy inert ion strikes on cell density-dependent profile variation and distortion during the etching process for high-aspect ratio features
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Journal Articles

Experimental investigation on the evolution of vacuum arc in the quench protection switch based on forced current zero

Zongqian Shi, Xinkun Lv, Jing Guo, Sheng Li, Yongpeng Mo, Jiajia Sun
Journal: Physics of Plasmas
Phys. Plasmas 29, 093504 (2022)
https://doi.org/10.1063/5.0098731
Published: September 2022
View article titled, Experimental investigation on the evolution of vacuum arc in the quench protection switch based on forced current zero
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Journal Articles

Pinching arc plasmas by high-frequency alternating longitudinal magnetic field

Xiaoliang Wang, Andrew Harrison, Yunlong Chang, Jian Liu
Journal: Physics of Plasmas
Phys. Plasmas 29, 073506 (2022)
https://doi.org/10.1063/5.0083796
Published: July 2022
View article titled, Pinching arc plasmas by high-frequency alternating longitudinal magnetic field
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Journal Articles

TCAD augmented generative adversarial network for hot-spot detection and mask-layout optimization in a large area HARC etching process

Hyoungcheol Kwon, Hyunsuk Huh, Hwiwon Seo, Songhee Han, Imhee Won, Jiwoong Sue, Dongyean Oh, Felipe Iza, Seungchul Lee, Sung Kye Park, Seonyong Cha
Journal: Physics of Plasmas
Phys. Plasmas 29, 073504 (2022)
https://doi.org/10.1063/5.0093076
Published: July 2022
View article titled, TCAD augmented generative adversarial network for hot-spot detection and mask-layout optimization in a large area HARC etching process
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