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    Photolithography
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    Magazine Articles

    Wavefront Engineering for Photolithography

    Marc D. Levenson
    Physics Today 46 (7), 28–36 (1993);
    https://doi.org/10.1063/1.881357
    Published: July 1993
    Abstract
    View article titled, Wavefront Engineering for Photolithography
    Open the PDF for Wavefront Engineering for Photolithography in another window
    Magazine Articles

    Industry Gambles on Electron Synchrotrons for X‐Ray Lithography

    Barbara Goss Levi
    Physics Today 44 (10), 17–21 (1991);
    https://doi.org/10.1063/1.2810272
    Published: October 1991
    Abstract
    View article titled, Industry Gambles on Electron Synchrotrons for X‐Ray Lithography
    Open the PDF for Industry Gambles on Electron Synchrotrons for X‐Ray Lithography in another window
    Magazine Articles

    Langmuir‐Blodgett Films

    Vijendra K. Agarwal
    Physics Today 41 (6), 40–46 (1988);
    https://doi.org/10.1063/1.881121
    Published: June 1988
    Abstract
    View article titled, Langmuir‐Blodgett Films
    Open the PDF for Langmuir‐Blodgett Films in another window
    • Online ISSN 1945-0699
    • Print ISSN 0031-9228

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