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Microscience: an overview
Science and technology are advancing together, each contributing to the other to produce ever smaller and more sophisticated structures and to permit investigation of new classes of phenomena.
The National Submicron Facility
This interdisciplinary field now has a center where equipment, expertise and information are all available to university scientists who could not otherwise afford microstructure research.
High‐resolution systems for microfabrication
With far‐ultraviolet and x‐ray lithography, optical projection systems and electron‐ and ion beam methods, one can produce solid‐state logic circuits at “biological” densities.
Microstructures and microelectronics
The ability to construct thousands of electronic devices connected into complex circuits on small silicon chips lets us make new kinds of “smart” instruments and is leading to a new industrial revolution.