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Reactive‐Ion Etching
Physics Today 39 (10), 26–33 (1986);
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- HeeHwan Choe
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- Xiao-Jiao Du
- Tian-Jun Li
- Li-Han Wang
- Zi-Ru Ma
- Lin-Fan Zhu
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- D A Toneli
- R S Pessoa
- M Roberto
- J T Gudmundsson
Plasma Sources Science and Technology 28 (2), 025007 (2019);
- János Szívós
- Miklós Serényi
- Szilárd Pothorszky
- András Deák
- Gábor Vértesy
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Surface and Coatings Technology (2017) 313: 115.
- Morteza Miansari
- James R. Friend
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- Dedong Wang
- Yikui Fan
- Zilong Zhao
- Guangxin Min
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- Harinarayanan Puliyalil
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Nanomaterials 6 (6), 108 (2016);
- Sunil Kumar
- Pragya Bhatt
- B.K. Singh
- Ajai Kumar
- R. Shanker
International Journal of Mass Spectrometry (2015) 385: 32.
- Yuan Yu
- Liangzhuan Wu
- Jinfang Zhi
Angewandte Chemie International Edition 53 (52), 14326 (2014);
- Yuan Yu
- Liangzhuan Wu
- Jinfang Zhi
Angewandte Chemie 126 (52), 14552 (2014);
- Chalermwat Wongwanitwattana
- Vishal A. Shah
- Maksym Myronov
- Evan H. C. Parker
- Terry Whall
- David R. Leadley
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- Sarah-Katharina Meisenheimer
- Sabrina Jüchter
- Oliver Höhn
- Hubert Hauser
- Christine Wellens
- Volker Kübler
- Elizabeth von Hauff
- Benedikt Bläsi
Optical Materials Express 4 (5), 944 (2014);
- Isaac Rodríguez-Ruiz
- Andreu Llobera
- Jordi Vila-Planas
- Donald W. Johnson
- Jaime Gómez-Morales
- Juan Manuel García-Ruiz
Analytical Chemistry 85 (20), 9678 (2013);
- Henning Helmers
- Eduard Oliva
- Wolfgang Bronner
- Frank Dimroth
- Andreas W. Bett
IEEE Transactions on Electron Devices 57 (12), 3355 (2010);
- A. N. Nazarov
Semiconductor physics, quantum electronics and optoelectronics 11 (2), 101 (2008);
- Hong Ying
- J. P. Barnak
- Y. L. Chen
- R. J. Nemanich
MRS Proceedings (1995) 386
- W. Pamler
Surface and Interface Analysis 22 (1-12), 331 (1994);
- I. Bello
- W.H. Chang
- X.H. Feng
- W.M. Lau
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (1993) 80-81: 1002.
- D. Bauza
- C. Mallardeau
- G. Pananakakis
Physica Status Solidi (a) 137 (1), 115 (1993);
- Czesław Szmytkowski
- Andrzej M. Krzysztofowicz
- Piotr Janicki
- Lech Rosenthal
Chemical Physics Letters 199 (1-2), 191 (1992);
- G. Tas
- R. J. Stoner
- H. J. Maris
- G. W. Rubloff
- G. S. Oehrlein
- J. M. Halbout
MRS Proceedings (1992) 259
- P Brault
Journal of Physics: Condensed Matter 3 (36), 7073 (1991);
- W.M. Lau
- X. Feng
- I. Bello
- S. Sant
- K.K. Foo
- R.P.W. Lawson
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (1991) 59-60: 316.
- W. Pamler
- F. Bell
- L. Mühlhoff
- H.J. Barth
Materials Science and Engineering: A (1991) 139: 364.
- F. P. Wang
- J. G. Xu
- H. H. Sun
Journal of Applied Physics 68 (4), 1520 (1990);
- M. Grasserbauer
- G. Stingeder
Fresenius' Journal of Analytical Chemistry 337 (6), 701 (1990);
- M Grasserbauer
Thin Solid Films 181 (1-2), 17 (1989);
- M. Konuma
- H. Stutzler
- J. Kuhl
- E. Bauser
Applied Physics A Solids and Surfaces 48 (5), 465 (1989);
- B. O. Kolbesen
- W. Pamler
Fresenius' Zeitschrift für analytische Chemie 333 (4-5), 561 (1989);
- A. Henry
- O. O. Awadelkarim
- J. L. Lindström
- G. S. Oehrlein
Journal of Applied Physics 66 (11), 5388 (1989);
- J. L. Shohet
- W. L. Phillips
- A. R. T. Lefkow
- J. W. Taylor
- C. Bonham
- J. T. Brenna
Plasma Chemistry and Plasma Processing 9 (2), 207 (1989);
- A. Henry
- O.O. Awadelkarim
- J.L. Lindström
- G.S. Oehrlein
Materials Science and Engineering: B 4 (1-4), 147 (1989);
- Fran Adar
Microchemical Journal 38 (1), 50 (1988);
- M G Curtis
- I C Walker
- K J Mathieson
Journal of Physics D: Applied Physics 21 (8), 1271 (1988);
- G. F. Feng
- M. Holtz
- R. Zallen
- J. M. Epp
- J. G. Dillard
- E. Cole
- P. Johnson
- S. Sen
- L. C. Burton
MRS Proceedings (1987) 93
- K A Blanks
- K Becker
Journal of Physics B: Atomic and Molecular Physics 20 (22), 6157 (1987);
- K. A. Blanks
- A. E. Tabor
- K. Becker
The Journal of Chemical Physics 86 (9), 4871 (1987);