Skip Nav Destination
Glow Discharge Processes: Sputtering and Plasma Etching
Physics Today 34 (7), 62 (1981);
This article has been cited by the following articles in journals that are participating in CrossRef Cited-by Linking.
- Martin Amberg
- Barbara Hanselmann
- Dirk Hegemann
Surface and Coatings Technology (2025) 497: 131806.
- Oat Bahadur Dhakal
- Roshani Dahal
- Prajwal Lamichhane
- Tirtha Raj Acharya
- Eun Ha Choi
Process Safety and Environmental Protection (2024) 190: 744.
- Jomar U. Tercero
- Michiro Isobe
- Kazuhiro Karahashi
- Magdaleno R. Vasquez
- Satoshi Hamaguchi
Journal of Vacuum Science & Technology A (2024) 42 (5)
- Jomar U. Tercero
- Akiko Hirata
- Michiro Isobe
- Kazuhiro Karahashi
- Masanaga Fukasawa
- Satoshi Hamaguchi
Surface and Coatings Technology (2024) 477: 130365.
- Jomar U. Tercero
- Michiro Isobe
- Kazuhiro Karahashi
- Satoshi Hamaguchi
Japanese Journal of Applied Physics 63 (7), 07SP03 (2024);
- Shimin Li
- Xixi Jiang
- Chaohai Zhang
IEEE Transactions on Dielectrics and Electrical Insulation 31 (1), 222 (2024);
- Thangjam Rishikanta Singh
- Prince Alex
- Suraj Kumar Sinha
Physics Letters A (2023) 477: 128897.
- Youbin Seol
- Minsu Choi
- Hongyoung Chang
- Shinjae You
Materials 16 (10), 3846 (2023);
- J. Taghinejad
- A.R. Niknam
- M. Rahimi Ghahyazi
- A. Moradkhani
Vacuum (2023) 215: 112312.
- Seon Mi Ahn
- Gil Su Jang
- Du Yun Kim
- Nong-Moon Hwang
Electronic Materials Letters 19 (3), 298 (2023);
- Djordje Spasojević
- Nikola V. Ivanović
- Nikodin V. Nedić
- Milica Vasiljević
- Nikola M. Šišović
- Nikola Konjević
The European Physical Journal D (2023) 77 (5)
- Daniel de Moraes Lima
- Sinval Pedroso da Silva
- Claudinei Alfredo do Nascimento
- Ernane Rodrigues da Silva
Materials Research (2022) 25
- Guo Zhu
- Qixin Du
- Baijun Xiao
- Ganxin Chen
- Zhiyin Gan
Materials 15 (24), 8904 (2022);
- Anastasiya Sergievskaya
- Adrien Chauvin
- Stephanos Konstantinidis
Beilstein Journal of Nanotechnology (2022) 13: 10.
- Takashi Ikehata
IEEE Transactions on Plasma Science 50 (9), 2886 (2022);
- Chunyue Fang
- Yuhan Zhou
- Lixia Jia
- Ruosi Yan
Polymer Composites 43 (8), 4866 (2022);
- Du-Yun Kim
- Ji-Hye Kwon
- Gil-Su Jang
- Nong-Moon Hwang
Coatings 11 (2), 132 (2021);
- Alexander Efremov
- Byung Jun Lee
- Kwang-Ho Kwon
Materials 14 (6), 1432 (2021);
- Aditya Prabaswara
- Jens Birch
- Muhammad Junaid
- Elena Alexandra Serban
- Lars Hultman
- Ching-Lien Hsiao
Applied Sciences 10 (9), 3050 (2020);
- Ji-Hye Kwon
- Du-Yun Kim
- Nong-Moon Hwang
Coatings 10 (5), 443 (2020);
- Gil-Su Jang
- Du-Yun Kim
- Nong-Moon Hwang
Coatings 10 (8), 736 (2020);
- Octavian-Gabriel Simionescu
- Cosmin Romanițan
- Oana Tutunaru
- Valentin Ion
- Octavian Buiu
- Andrei Avram
Coatings 9 (7), 442 (2019);
- Melanie Macgregor
- Krasimir Vasilev
Materials 12 (1), 191 (2019);
- M.N. Polyakov
- M. Morstein
- X. Maeder
- T. Nelis
- D. Lundin
- J. Wehrs
- J.P. Best
- T.E.J. Edwards
- M. Döbeli
- J. Michler
Surface and Coatings Technology (2019) 368: 88.
- I A Morozov
- A S Gudovskikh
- D A Kudryashov
- K P Kotlyar
- K Y Shubina
Journal of Physics: Conference Series (2018) 1124: 041031.
- Armstrong Godoy
- Felipe Gondim Carlucci
- Douglas Marcel Gonçalves Leite
- Walter Miyakawa
- André Luis Jesus Pereira
- Marcos Massi
- Argemiro Soares da Silva Sobrinho
Surface and Coatings Technology (2018) 354: 153.
- T. Mussenbrock
Contributions to Plasma Physics 52 (7), 571 (2012);
- Mitsunori YABE
- Shigeru UMEMURA
- Shigeru HIRONO
Journal of The Surface Finishing Society of Japan 61 (5), 379 (2010);
- Mitsunori YABE
- Shigeru UMEMURA
- Shigeru HIRONO
IEICE Transactions on Electronics E93-C (4), 527 (2010);
- J.G. Saraiva
- A. Wemans
- M.J.P. Maneira
- A. Maio
- J. Patriarca
IEEE Transactions on Nuclear Science 51 (3), 1235 (2004);
- M. W. Thompson
- J. S. Colligon
- R. Smith
- C. D. W. Wilkinson
- M. Rahman
Philosophical Transactions of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences 362 (1814), 125 (2004);
- D.P. Verret
- A. Krishnan
- S. Krishnan
IEEE Transactions on Electron Devices 49 (7), 1274 (2002);