Skip to Main Content
Skip Nav Destination

High‐resolution systems for microfabrication

Physics Today 32 (11), 38–45 (1979);
This article has been cited by the following articles in journals that are participating in CrossRef Cited-by Linking.
  • J. Rant
  • A. Loose
  • R. Ilić
International Journal of Radiation Applications and Instrumentation. Part D. Nuclear Tracks and Radiation Measurements 12 (1-6), 941 (1986);
  • H. H. Busta
  • A. D. Feinerman
  • J. B. Ketterson
  • G. K. Wong
Journal of Applied Physics 58 (2), 987 (1985);
  • Bernd Eberhard Fischer
  • Reimar Spohr
Reviews of Modern Physics 55 (4), 907 (1983);
  • Murrae J. Bowden
Radiation Physics and Chemistry (1977) 18 (1-2), 357 (1981);
  • J E Curran
Journal of Physics E: Scientific Instruments 14 (4), 393 (1981);
Close Modal

or Create an Account

Close Modal
Close Modal