As physicists seek to probe and control phenomena on increasingly smaller length scales, coherent sources of radiation in the extreme ultraviolet (EUV or XUV, 10–100 nm) and soft x‐ray (1‐30 nm) regions of the spectrum are increasingly in demand. The semiconductor industry, for example, is eagerly pursuing EUV sources that can generate smaller linewidths beyond the limits of optical lithography. And femtosecond chemistry could benefit from light sources capable of producing very short pulses at small wavelengths.
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© 2000 American Institute of Physics.
2000
American Institute of Physics
