Physicists have always been fascinated by the very small. These days, the inner structures of everyday items such as the personal computer fall into that size category and warrant our interest. The critical dimensions of individual features of state‐of‐the‐art memory chips are now as small as 500 nanometers and are getting smaller. The microwave transistors in some satellite dish receivers require gates smaller than a quarter of a micron.
REFERENCES
1.
2.
W. M. Moreau, Semiconductor Lithography: Principles, Practices and Materials, Plenum, New York (1988), ch. 8.
3.
4.
A. Broers, New Scientist, 18 April 1992, p. 23.
5.
M. D.
Levenson
, N. S.
Viswanathan
, R. A.
Simpson
, IEEE Trans. Electron. Devices
29
, 1828
(1982
).M. Shibuya, Japanese patent number Showa 62‐50811 (1980).
A fabrication technology for a very similar mask with applications in optical data storage and character recognition was patented in the German Democratic Republic in 1976 by Hartmut Hänsel and Wulf Polack of VEB Carl Zeiss, Jena; patent number DD 126 361.
6.
T.
Terasawa
, N.
Hasegawa
, T.
Tanaka
, S.
Katagiri
, T.
Kurosaki
, J. Vac. Sci. Technol. B
8
, 1300
(1990
).7.
J.
Nistler
, G.
Hughes
, A.
Muray
, J.
Wiley
, Proc. SPIE
1604
, 236
(1991
).8.
M. D. Levenson, Microlithography World, September‐October 1992, p. 7.
9.
Y.‐C.
Ku
, E. H.
Anderson
, M. L.
Shattenburg
, H. I.
Smith
, J. Vac. Sci. Technol. B
6
, 150
(1988
).10.
J.
Durnin
, J. J.
Micelli
Jr, J. H.
Eberly
, Phys. Rev. Lett.
58
, 1499
(1987
).11.
M. D. Levenson, F. M. Schellenberg, Microlithography World, May‐June 1992, p. 7.
12.
K.
Inokuchi
, T.
Saito
, H.
Jinbo
, Y.
Yamashita
, Y.
Sano
, Jpn. J. Appl. Phys.
30
, 3318
(1991
).13.
H.
Watanabe
, Y.
Todokoro
, Y.
Hirai
, M.
Inoue
, Proc. SPIE
1463
, 101
(1991
).14.
T. Yamanaka, N. Hasegawa, T. Tanaka, K. Ishibashi, T. Hashimoto, A. Shimizu, N. Hashimoto, K. Sasaki, T. Nishida, E. Takeda, “A Super‐Low‐Power SRAM Cell Using a New Phase‐Shift Lithography,” International Electron Devices Meeting‐90 Technical Digest (1990), p. 477.
15.
H. Asakura, Y. Funaki, Nikkei Microdevices, April 1992, p. 23 (in Japanese; translation available from Japanese Technical Translators, Sunnyvale, Calif.).
16.
K. Sagara, T. Kure, S. Shukuri, J. Yugami, N. Hasegawa, H. Shinriki, H. Goto, H. Yamashita, E. Takeda, in 1992 Symp. On VLSI Technology (Seattle): Digest of Technical Papers, IEEE, New York (1992), p. 10.
17.
N. Hasegawa, T. Tanaka, A. Imai, H. Fukuda, in Abstr. 51st Annu. Mtg. Jpn. Soc. Appl. Phys., vol. 2, paper 27P‐ZG‐10 (1990), p. 493 (in English).
18.
N.
Shiraishi
, S.
Hirokawa
, Y.
Takeuchi
, N.
Magome
, Proc. SPIE
1674
, 741
(1992
).M.
Noguchi
, M.
Muraki
, Y.
Iwasai
, A.
Suzuki
, Proc. SPIE
1674
, 92
(1992
).19.
20.
A.
Grenville
, R. L.
Hsieh
, R. von
Bunau
, Y. H.
Lee
, D. A.
Markle
, G.
Owen
, R. F. W.
Pease
, J. Vac. Sci. Technol. B
9
, 3108
(1991
).R. L.
Hsieh
, A.
Grenville
, G.
Owen
, R. F.
Pease
, J. Vac. Sci. Technol. B
10
, 3042
(1992
).21.
J. E.
Bjorkholm
, J.
Bokor
, L.
Eichner
, R. R.
Freeman
, J.
Gregus
, T. E.
Jewell
, W. M.
Mansfield
, A. A.
MacDowell
, E. L.
Raab
, W. T.
Silvast
, L. H.
Szeto
, D. M.
Tennant
, W. K.
Wakiewicz
, D. L.
White
, O. R.
Wood
, J. H.
Bruning
, J. Vac. Sci. Technol. B
8
, 1509
(1990
).
This content is only available via PDF.
© 1993 American Institute of Physics.
1993
American Institute of Physics
You do not currently have access to this content.
