Ion Implantation of Semiconductors

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November 01 1977

G. Carter;

G. Carter

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W. A. Grant;

W. A. Grant

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J. M. Poate

Reviewer

Bell Laboratories, Murray Hill, N.J.

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Physics Today 30 (11), 67–68 (1977);

https://doi.org/10.1063/1.3037795

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