Ion Beams With Application to Ion Implantation

Wilson, R. G.; Brewer, G. R.; Laubert, Roman

doi:10.1063/1.3069159

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September 01 1975

Ion Beams With Application to Ion Implantation

R. G. Wilson;

R. G. Wilson

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G. R. Brewer;

G. R. Brewer

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Roman Laubert

Reviewer

New York University, New York, New York

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Author & Article Information

R. G. Wilson

,

G. R. Brewer

,

Roman Laubert

New York University, New York, New York

Physics Today 28 (9), 54 (1975);

https://doi.org/10.1063/1.3069159

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Ion Beams With Application to Ion Implantation