The basis for essentially all gauges used for total or partial‐pressure measurement in ultrahigh vacuum is the ionization produced by electrons traversing the space between two electrodes. The ratio of ion current to ionizing current is measured and assumed to be proportional to the gas density or pressure. This principle has been used for over fifty years, spurred and nurtured by the vacuum‐tube industry, so it was natural that early gauges resembled simple triode receiving tubes (see figure 1 on the facing page).
REFERENCES
1.
2.
W. B. Nottingham, Proceedings of the MIT Conf. on Phys. Electronics (1947).
3.
4.
5.
6.
W. H. Hayward, R. L. Jepsen, P. A. Redhead, Trans. 10th Amer. Vac. Soc. Natl. Vac. Symp., Macmillan, New York (1963), page 228.
7.
J. A.
Becker
, E. J.
Becker
, R. G.
Brandes
, J. Appl. Phys.
32
, 411
(1961
).8.
9.
10.
E. Apgar, Proceedings of the 2nd European Vac. Symp. (1963), page 223.
11.
12.
13.
14.
15.
16.
17.
18.
19.
20.
J. M. Lafferty, Trans. 7th Amer. Vac. Soc. Natl. Vac. Symp., Pergamon Press, New York (1960), page 97.
21.
22.
23.
24.
This content is only available via PDF.
© 1972 American Institute of Physics.
1972
American Institute of Physics
You do not currently have access to this content.