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Journal Articles

Fabrication of high-quality surface microtextures on GaN by femtosecond laser direct writing

Open Access
Rushuai Hua, Zongwei Xu, Zhixiang Tao, Bing Dong, Hong Wang, Long Yang
Journal: Nanotechnology and Precision Engineering
Nanotechnol. Precis. Eng. 8, 013005 (2025)
https://doi.org/10.1063/10.0028760
Published: October 2024
View articletitled, Fabrication of high-quality surface microtextures on GaN by femtosecond laser direct writing
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Includes: Supplementary data
Journal Articles

Investigation of high-quality-factor aluminum nitride MEMS cantilever resonators

Open Access
Shuai Shi, Qingrui Yang, Yi Yuan, Haolin Li, Pengfei Niu, Wenlan Guo, Chen Sun, Wei Pang
Journal: Nanotechnology and Precision Engineering
Nanotechnol. Precis. Eng. 7, 013004 (2024)
https://doi.org/10.1063/10.0022173
Published: November 2023
View articletitled, Investigation of high-quality-factor aluminum nitride MEMS cantilever resonators
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Journal Articles

Design and fabrication of a series contact RF MEMS switch with a novel top electrode

Editor’s PickOpen Access
Qiannan Wu, Honglei Guo, Qiuhui Liu, Guangzhou Zhu, Junqiang Wang, Yonghong Cao, Mengwei Li
Journal: Nanotechnology and Precision Engineering
Nanotechnol. Precis. Eng. 6, 013006 (2023)
https://doi.org/10.1063/10.0016903
Published: January 2023
View articletitled, Design and fabrication of a series contact RF MEMS switch with a novel top electrode
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Journal Articles

Study on precision dicing process of SiC wafer with diamond dicing blades

Open Access
Xue Wang, Zewei Yuan, Peng Zhuang, Tianzheng Wu, Shuang Feng
Journal: Nanotechnology and Precision Engineering
Nanotechnol. Precis. Eng. 4, 033004 (2021)
https://doi.org/10.1063/10.0005152
Published: June 2021
View articletitled, Study on precision dicing process of SiC wafer with diamond dicing blades
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Journal Articles

Characterization of machine tools and measurement system for micromilling

Open Access
Andrea Abeni, Matteo Lancini, Aldo Attanasio
Journal: Nanotechnology and Precision Engineering
Nanotechnol. Precis. Eng. 2, 23–28 (2019)
https://doi.org/10.1016/j.npe.2019.03.006
Published: March 2019
View articletitled, Characterization of machine tools and measurement system for micromilling
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Journal Articles

Finite element simulation of the micromachining of nanosized-silicon-carbide-particle reinforced composite materials based on the cohesive zone model

Open Access
Hongmin Pen, Jianhua Guo, Zizhen Cao, Xianchong Wang, Zhiguo Wang
Journal: Nanotechnology and Precision Engineering
Nanotechnol. Precis. Eng. 1, 242–247 (2018)
https://doi.org/10.1016/j.npe.2018.12.003
Published: December 2018
View articletitled, Finite element simulation of the micromachining of nanosized-silicon-carbide-particle reinforced composite materials based on the cohesive zone model
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Journal Articles

Investigation on tool wear and tool life prediction in micro-milling of Ti-6Al-4V

FeaturedOpen Access
Amin Dadgari, Dehong Huo, David Swailes
Journal: Nanotechnology and Precision Engineering
Nanotechnol. Precis. Eng. 1, 218–225 (2018)
https://doi.org/10.1016/j.npe.2018.12.005
Published: December 2018
View articletitled, Investigation on tool wear and tool life prediction in micro-milling of Ti-6Al-4V
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