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Electron paramagnetic resonance characterization of aluminum ion implantation-induced defects in 4H-SiC

Nanotechnol. Precis. Eng. 2, 157–162 (2019)
This article has been cited by the following articles in journals that are participating in CrossRef Cited-by Linking.
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Nanotechnology and Precision Engineering 3, 211 (2020)
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