New dimensions in precision and the variety of machinable materials are enabled by the use of ultrashort laser pulses in material processing. Due to new powerful beam sources the processing efficiency has already reached an economic interesting state. Based on a regenerative disc amplifier the Dausinger+Giesen GmbH has developed a femtosecond source that is distinguished on its high flexibility and high pulse energy. Out of one resonator pulses with durations from 400 fs up to 1 µs can be emitted. The high repetition rate of up to 1 MHz at an average power of 50 W makes this system very attractive for processing development, because different available systems can be simulated in only one setup. The large variety in material processing from precision drilling, over volume ablation in different materials up to the structuring in thin films could be demonstrated over several pulse durations and even in hybrid processes.

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