As the demand for smaller manufactured structures increases, the techniques for efficient and economical UV micromachining continue to draw more attention. In the paper we investigate UV micropatterning methods in PETG, glass, and aluminium, comparing the commonly used percussion drilling with the flexible direct write methods. Issues such as sample speed and material removal rates as well as the size of heat effected areas are discussed.
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© 1997 Laser Institute of America.
1997
Laser Institute of America
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