Processing of indium tin oxide thin films by various types of pulsed lasers has been successfully demonstrated. These laser etching techniques, due to their unique properties compared to conventional wet processing, will have potential applications in manufacturing flat panel displays.

Topics
Laser materials processing, Transition metal oxides, Thin films
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© 1995 Laser Institute of America.
1995
Laser Institute of America
Topics
Laser materials processing Transition metal oxides Thin films
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