Development of high power excimer laser under AMMTRA project

We have developed a new excitation system consisted of a surface corona discharge preionizer and a spiker/sustainer circuit for high power XeCl laser. We demonstrated an average power of 505 W with a total efficiency of 2.1 % in 1990 FY. Our final target, 2 kW XeCl laser has been constructed. Minor improvements and optimization of the operating condition are in progress.