We have developed a new excitation system consisted of a surface corona discharge preionizer and a spiker/sustainer circuit for high power XeCl laser. We demonstrated an average power of 505 W with a total efficiency of 2.1 % in 1990 FY. Our final target, 2 kW XeCl laser has been constructed. Minor improvements and optimization of the operating condition are in progress.
Development of high power excimer laser under AMMTRA project
Kenyu Haruta; October 14–18, 2018. "Development of high power excimer laser under AMMTRA project." Proceedings of the International Congress on Applications of Lasers & Electro-Optics. ICALEO® ‘93: Proceedings of the Applying Lasers in Education Symposium. Orlando, FL, USA. (pp. pp. 270-277). ASME. https://doi.org/10.2351/1.5058582
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