Trends of excimer laser processing in Japan – From the point of view of job shop

This paper describes current circumstances on applications of the excimer laser in Japan from the viewpoints of Tosei Electrobeam Co., Ltd. as a job shop who has the excimer laser system.

1. 20 industrial excimer lasers are running to date, most of which are adopted to precise process of polymers.

2. 40% of those samples processed in the job shop are made of metals and ceramics. Processing of these inorganic mmaterials potentially calls for the excimer laser system.