A new laser system designed for micromachining of lithographic structures of micron dimension is described. Examples of application of the equipment is given.

Topics
Laser systems design, Semiconductors, Micro-machining
This content is only available via PDF.
© 1982 Laser Institute of America.
1982
Laser Institute of America
Topics
Laser systems design Semiconductors Micro-machining
You do not currently have access to this content.