This paper focuses on precision machining of transparent materials by means of ablative and non-ablative femtosecond laser processing. Ablation technology will be compared with a newly developed patent pending non-ablative femtosecond process, ClearShape™, using the Spectra-Physics® Spirit® industrial femtosecond laser.

1.
Chichkov
,
B.N.
,
Momma
,
C.
,
Nolte
,
S.
,
von Alvensleben
,
F.
,
Tünnermann
,
A.
 (
1996
)
Femtosecond picosecond and nanosecond laser ablation of solids
,
Applied Physics A
63
,
109
–
115
.
https://doi.org/10.1007/BF01567637
Google Scholar
Crossref
Search ADS
 
2.
Chien
,
C.Y.
,
Gupta
,
M.C.
 (
2005
)
Pulse width effect in ultrafast laser processing of material
,
Applied Physics A: Materials Science & Processing
81
,
1257
–
1263
.
https://doi.org/10.1007/s00339-004-2989-z
Google Scholar
Crossref
Search ADS
 
3.
Dausinger
,
F.
,
Lichter
,
F.
,
Lubatschowski
,
H.
 (
2004
) Femtosecond Technology for Technical and Medical Applications,
Springer
.
4.
König
,
J.
,
Nolte
,
S.
,
Tünnermann
,
A.
 (
2005
)
Plasma evalution during metal ablation with ultrashort laser pulses
,
Optics Express
13
,
10597
–
10607
.
https://doi.org/10.1364/OPEX.13.010597
Google Scholar
Crossref
Search ADS
PubMed
 
5.
Momma
,
C.
,
Chichkov
,
B.N.
,
Nolte
,
S.
,
von Alvensleben
,
F.
,
Tünnermann
,
A.
,
Welling
,
H.
,
Wellegehausen
,
B.
 (
1996
)
Short-pulse laser ablation of solid targets
,
Optics Communications
129
,
134
–
142
.
https://doi.org/10.1016/0030-4018(96)00250-7
Google Scholar
Crossref
Search ADS
 
6.
Li
,
Y.
,
Latham
,
W.P.
,
Kar
,
A.
 (
2001
)
Lumped parameter model for multimode laser cutting
,
Optics and Lasers in Engineering
35
,
371
–
386
.
https://doi.org/10.1016/S0143-8166(01)00024-0
Google Scholar
Crossref
Search ADS
 
7.
Tseng
,
A.A.
,
Chen
,
Y.-T.
,
Ma
,
K.-J.
 (
2004
)
Fabrication of high-aspect-ratio microstructures using excimer laser
,
Optics and Lasers in Engineering
41
,
827
–
847
.
https://doi.org/10.1016/S0143-8166(03)00062-9
Google Scholar
Crossref
Search ADS
 
8.
Schille
,
J.
,
Schneider
,
L.
,
Loeschner
,
U.
,
Ebert
,
R.
,
Scully
,
P.
,
Goddard
,
N.
,
Steiger
,
B.
,
Exner
,
H.
 (
2011
) Micro processing of metals using a high repetition rate femtosecond laser: from laser process parameter study to machining examples. in
Proceeding of ICALEO
2011.
Orlando
,
FL, USA
.
Google Scholar
 
9.
Hendricks
,
F.
,
Aus der Au
,
J.
,
Matylitsky
,
V.V.
 (
2014
)
High Aspect Ratio Microstructuring of Transparent Dielectrics using Femtosecond Laser Pulses: Method for Optimization of the Machining Throughput
,
Appl. Phys. A
117
,
149
–
153
.
https://doi.org/10.1007/s00339-014-8312-8
Google Scholar
Crossref
Search ADS
 
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