Femtosecond laser pulses are of particular interest for internal modification of transperent materials as they enable nonlinear absorption due to the extremly high intensity in the focal volume. Since output from commercial laser sources currently exceeds single beam process requirements, parallel processing with multiple beams could provide a route to up-scaling processing speed and establish cost-effectiveness.
The use of spatial light modulators, driven by fast computer-generated holograms for splitting a parent laser beam into a number of beamlets and digitally manipulate their positions and the laser intensity is demonstrated. With successful blocking of the zero order beam and subsequent focusing of the diffracted beams inside transperant materials, high throughput dynamic 2D/3D refractive index modification of polymer and glass substrates with a gain factor G > 20 has been achieved. Fundamental IR (775nm) femtosecond laser pulses were employed to produce optical components. For example, thick volume gratings written with more than 20 beams have 1st order diffraction efficiency η > 60%, indicating a refractive index change Δn ≈ 1.6×10−4.
Characterization by microscopic examination and light coupling tests revealed the extent of resolution, process quality and assisted quantification of the process speed gain. The benefits and current limitations of this technique are discussed in detail.