The fast growing market of gas sensing devices stimulates development of versatile technologies for fabrication of gas sensor. In this paper, laser micro cladding electronic materials (LMCEM) is presented for rapid prototyping of SnO2-based thick film gas sensor on alumina substrate. Gas-sensing paste, heating material and electrode material were deposited onto substrate by Micropen in a layer by layer fashion, and then patterned and sintered by a quasi-continuous-wave Nd:YAG laser without the use of any high temperature post processing. The effects of the processing parameters on the quality of the fabricated components were investigated. The electrical response of gas-sensing film to ethanol vapor has been performed. The gas-sensing film fabricated by LMCEM has shown gas-sensing characteristics similar to SnO2 film realized with conventional oven heat sintering. The results show that LMCEM technique is a simple and flexible process and thus is suitable for the cost efficient fabrication of a new gas-sensing device.
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4th Pacific International Conference on Laser Materials Processing, Micro, Nano and Ultrafast Fabrication
March 23–25, 2010
Wuhan, People's Republic of China
ISBN:
978-0-912035-56-7
PROCEEDINGS PAPER
Rapid prototyping of gas sensor on alumina substrate by laser micro cladding electronic materials
Zhixiang Cai;
Zhixiang Cai
Laser Division, Wuhan National Laboratory for Optoelectronics Huazhong University of Science and Technology
, Wuhan-430074, China
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Xiaoyan Zeng
Xiaoyan Zeng
Laser Division, Wuhan National Laboratory for Optoelectronics Huazhong University of Science and Technology
, Wuhan-430074, China
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Published Online:
March 01 2010
Citation
Zhixiang Cai, Xiaoyan Zeng; March 23–25, 2010. "Rapid prototyping of gas sensor on alumina substrate by laser micro cladding electronic materials." Proceedings of the 4th Pacific International Conference on Laser Materials Processing, Micro, Nano and Ultrafast Fabrication. PICALO 2010: 4th Pacific International Conference on Laser Materials Processing, Micro, Nano and Ultrafast Fabrication. Wuhan, People's Republic of China. (pp. M705). ASME. https://doi.org/10.2351/1.5057265
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