Modeling and investigating of shock pressure for microscale laser shock processing Available to Purchase

Microscale laser shock processing (μLSP) is a surface treatment technology importing shock wave induced by micro-level laser beam into metallic material to improve its performance. It provides a feasible method for solving the problem of failure and reliability of Micro Electromechanical Systems (MEMS). In the previous relative researches, 1-D plasma pressure model for the FEM calculation of μLSP was mostly used. There existed the large difference of plastic deformation caused by μLSP between numerical simulation and experiment. Basing the physical development process and explosion theory in space for plasma, the 2-D pressure model spatial distribution considering tangential force is presented in current work, which improves the calculation precision of plastic deformation through comparing the previous results. The infinite elements are imported μLSP calculation. The semi-infinite body model is assumed only in radial direction, which is consistent with MEMS components. This study enriches the theory and experiment investigation of μLSP on the metal materials for MEMS components and also establishes the basis for the further research of μLSP.