The cupreous hollow probe of 0.7∼3 mm thickness is an important component in the laser-beam quality diagnostic instrument which is used to measure laser parameters such as beam mode structure, focusing spot morphology of high power laser. But the microhole in the probe with four types of diameter (10µm, 20µm, 30µm, 40µm) is easily destroyed, and hard to process by traditional technique. In this paper a frequency tripled DPSS laser (λ=355nm, Pmax=10W, τ=15ns, M2<1.2) was employed to drill microhole on the probe. The technique is studied and the microholes were obtained with laser pulse repetition rate of 2000Hz and corresponding power of 1.16W. The diameter of minimum microhole obtained is 6.57µm. They were successfully used in the instrument of the laser quality diagnostic. In addition, the relationship of the microholes’ diameter and the distance of the work piece away from the focusing spot was also investigated.

1.
J.v.
Gilse
,
S.
Kocazera
&
D.
Greby
(
1991
)
Direct laser beam diagnostics
,
SPIE
1414
,
45
54
.
2.
Z.Y.
Wang
,
T.
Chen
&
Y.
Ding
et al (
1998
)
High-power CO2 blending mode laser beam propagation and focus on account of phase shifts
,
SPIE
3268
,
18
27
.
3.
H.K.
Tönshoff
,
F.v.
Alvensleben
(
1993
)
Micro drilling with a Nd:YAG-Q-switch-laser
,
SPIE
1864
,
96
117
.
4.
M.J.
Jackson
,
W.
O’Neill
(
2003
)
Laser micro-drilling of tool steel using Nd:YAG lasers
,
Journal of Materials Processing Technology
142
,
517
525
.
5.
X.L.
Chen
,
A.L.
Ortiz
&
P.R.
Staver
et al (
1996
)
Materials processing with high peak power Nd:YAG laser at the second harmonic wavelength
,
ICALEO’96-proceedings of the laser materials processing conference
81
,
C95
C103
.
6.
L.
Tunna
,
A.
Kearns
&
W.
O’Neill
(
2001
)
Micromachining of copper using Nd:YAG laser radiation at 1064, 532, and 355 nm wavelengths
,
Optics & Laser Technology
33
,
135
143
.
7.
J.
Jandeleit
,
P.
Ruβbüldt
&
G.
Urbasch
et al (
1997
)
Picosecond imaging of laser-induced ablation processes and production of microstructure by picosecond laser pulses
,
SPIE
3092
,
481
484
.
8.
J.X.
Zhao
,
B.
Huettner
&
A.
Menschig
(
2001
)
Microablation with ultrashort laser pulses
,
Optics & Laser Technology
33
,
487
491
.
9.
X.
Zhu
,
D.M.
Villeneuve
&
A.Y.
Naumov
et al (
1999
)
Experimental study of drilling sub-10 mm holes in thin metal foils with femtosecond laser pulses
,
Applied Surface Science
152
,
138
148
.
10.
B.S.
Shin
,
J.Y.
Oh
&
H.
Sohn
(
2007
)
Theoretical and experimental investigations into laser ablation of polyimide and copper films with 355-nm Nd:YVO4 laser
,
Journal of Materials Processing Technology
187–188
,
260
263
.
This content is only available via PDF.
You do not currently have access to this content.