Laser micro-processing system, which consisted of five-axis PC-controlled automatic stage and FHG of Nd:YAG/ Yb doped fiber laser oscillators, was developed. By arrangement of the stages, this system enabled both of milling and lathe processing for various materials. In this study, for example, a micro-windmill (outer diameter: 400 µm) of polyimide and a micro-cylindrical cantilever (diameter: 125 µm) of ion-exchanged lime-sodium glass were fabricated. The dimension errors of these elements were within five percent of designed diameters. A micro-spring (diameter: 460 µm) of stainless steel was also fabricated by laser lathe method coupled with electrochemical polishing technique.
REFERENCES
1.
Fujita
, H.
(2003
) Introduction to Micro/Nano Machine Technology
, Kogyo Chosakai Publishing
, 151
–182
(in Japanese).2.
Park
, J. H.
, Lee
, N. E.
, Lee
, J.
, Park
, J. S.
and Park
, H. D.
(2005
) Deep Dry Etching of Borosilicate Glass using SF6 and SF6/Ar Inductively Coupled Plasmas
, Microelectronic Engineering
, 82
, 119
–128
.3.
Kai
, A.
and Kawamura
, Y.
(2004
) Laser Micro Machining of Ultraviolet and Infrared Simultaneous Irradiation
, Proceedings of SPIE
, 5662
, 538
–542
.4.
Koyama
, T.
and Tsunetomo
, K.
(1997
) Laser Micromachining of Silicate Glasses Containing Silver Ions using a Pulsed Laser
, Japanese Journal of Applied Physics
, 36
, L244
–L247
.5.
Matsusaka
, S.
and Watanabe
, T.
Micro-machinability of silver-sodium ion-exchanged glass by UV nanosecond laser
, Journal of Materials Processing Technology
, in press.6.
Raval
, A.
, Choubey
, A.
, Engineer
, C.
& Kothwala
, D.
(2004
) Development and assessment of 316LVM cardiovascular stents
, Materials Science and Engineering A
386
, 331
–343
.
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© 2008 Laser Institute of America.
2008
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