Nowadays, flexible production systems for the laser joining of micro parts require a higher dynamic and precision, as well as a higher flexibility concerning the working space. The combination of miniaturized scanner-based laser joining systems and high-performance assembly systems is a new approach for a high accuracy compact micro assembly system with an increased flexibility. The use of high dynamic oscillation techniques leads on the one hand to a stabilization of the welding process of difficult-to-weld materials, e.g. of zinc-containing alloys, on the other hand to an increase of process velocity and reduction of the joining geometry, e.g. for the welding of plastic materials. Hence, a miniaturized laser processing optics is being developed with an integrated beam deflection for laser beam micro welding of metal as well as plastic materials. The requirements on this laser processing optics, the choice of a suitable beam deflection system and the design and simulation of the miniaturized optics are presented and discussed. Furthermore, laser beam micro welding application results are shown. These results influence directly the system design of new miniaturized laser processing optics. By means of the integration of high dynamic scanners further process improvements can be achieved for laser beam micro welding.

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