Titanium nitride is successfully obtained by the mixing method with CW-CO2 laser and nitrogen plasma beams coaxially on the surface of pure titanium in atmosphere ambience. In this technology, laser and plasma provide heat source and nitrogen ion source, respectively, easily to nitriding the sample. The feasibility of the method is analyzed in theory. Small-angle X-ray diffraction measurements reveal formation of titanium nitride in the as-treated sample, and scanning electron microscope measurements describe the depth of nitride layer, at different laser energy densities, different scanning velocities, and different plasma flux. Energy dispersive X-ray spectroscope measurements describe the nitrogen content of the different depth.

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