Laser Ablating and Chemical Etching Combined Machining and its simple facility are introduced. This combined etching method is used to process ceramic, quartz, alloy steel and some other high rigidity, high strength, high brittleness non-metal and metal for large scale cut. The technology reduces much slag and high roughness formed in course of laser ablating and improves the efficiency of etching. Meanwhile, machining effect of the combined method for those difficult-to-cut materials caused from erode medium, laser energy density, repetition rate, pulse width, scan velocity and other parameters is studied, and the combined etching mechanism is also analysed. After the fit technological parameters are found, several classic materials combined etching experiments are done and the results are very inspiring.

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