Speckle interferometry is a powerful technique for the static and dynamic characterization of micromechanical devices. In this paper we emphasize its capabilities for the determination of mechanical properties of Al micro-machined thin films. Micro-tensile testing system and the modified ESPI (Electronic Speckle Pattern Interferometry) for large deformation analysis are developed. Stress-strain curves for aluminum membrane are obtained and the mechanical properties, elastic modulus and yield stress, are estimated. The results show that yield stress is similar to Al bulk material but the elastic modulus is 60% of Al bulk material.
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© 2004 Laser Institute of America.
2004
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