Laser processing of glass components is of significant commercial interest for the optoelectronics and telecommunications industries. In this paper, we present laser processing techniques using microsecond, nanosecond, and femtosecond lasers for machining of glass. Surface structures, mainly groove geometries, are generated with a diode-pumped solid-state nanosecond pulsed UV laser operating at 266 nm, a Q-switched CO2 laser operating at 9.25 µm, a CO2 laser operating at 10.6 µm and a femtosecond pulsed laser operating at 800 nm. Grooves are cross-sectioned and viewed with a focused ion beam (FIB) microscope. The resultant material structures are examined with respect to the differences in time scale and the appropriateness of each laser type for particular processes.
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1st Pacific International Conference on Laser Materials Processing, Micro, Nano and Ultrafast Fabrication
April 19–21, 2004
Melbourne, Australia
ISBN:
978-0-912035-76-5
PROCEEDINGS PAPER
Glass processing using microsecond, nanosecond and femtosecond pulsed lasers Available to Purchase
Arzu Ozkan;
Arzu Ozkan
1
Coherent Inc
., 5100 Patrick Henry Drive, Santa Clara, CA 95054, USA
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Leonard Migliore;
Leonard Migliore
1
Coherent Inc
., 5100 Patrick Henry Drive, Santa Clara, CA 95054, USA
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Corey Dunsky;
Corey Dunsky
1
Coherent Inc
., 5100 Patrick Henry Drive, Santa Clara, CA 95054, USA
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John MacKay;
John MacKay
1
Coherent Inc
., 5100 Patrick Henry Drive, Santa Clara, CA 95054, USA
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Michael Phaneuf
Michael Phaneuf
2
Fibics Inc
., 556 Booth Street, Suite 200, Ottawa, Ontario K1A 0G1, Canada
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Published Online:
April 01 2004
Citation
Arzu Ozkan, Leonard Migliore, Corey Dunsky, John MacKay, Michael Phaneuf; April 19–21, 2004. "Glass processing using microsecond, nanosecond and femtosecond pulsed lasers." Proceedings of the 1st Pacific International Conference on Laser Materials Processing, Micro, Nano and Ultrafast Fabrication. PICALO 2004: 1st Pacific International Conference on Laser Materials Processing, Micro, Nano and Ultrafast Fabrication. Melbourne, Australia. (pp. M202). ASME. https://doi.org/10.2351/1.5056140
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