Laser processing of glass components is of significant commercial interest for the optoelectronics and telecommunications industries. In this paper, we present laser processing techniques using microsecond, nanosecond, and femtosecond lasers for machining of glass. Surface structures, mainly groove geometries, are generated with a diode-pumped solid-state nanosecond pulsed UV laser operating at 266 nm, a Q-switched CO2 laser operating at 9.25 µm, a CO2 laser operating at 10.6 µm and a femtosecond pulsed laser operating at 800 nm. Grooves are cross-sectioned and viewed with a focused ion beam (FIB) microscope. The resultant material structures are examined with respect to the differences in time scale and the appropriateness of each laser type for particular processes.

1.
Hans
Bach
and
Norbert
Neuroth
,
Properties of Optical Glass
,
Springer
.
1998
, p
288
308
.
2.
J.
Kruger
,
W.
Kautek
,
Appl. Surf. Sci
,
96-98
(
1996
),
430
3.
B.C.
Stuart
,
M.D.
Feit
,
S.
Herman
,
A.M.
Rubenchik
,
B. W.
Shore
, and
M.D.
Perry
, “
Optical ablation by high power short pulse lasers
”,
J. Opt. Soc. Am. B.
Vol
13
, No
2
, p
459
.
4.
B.N.
Chichkov
,
C.
Momma
,
S.
Nolte
,
F.
von Alvensleben
,
A.
Tunnermann
, “
Femtosecond, picosecond, and nano second laser ablation
:,
Appl. Phys.A.
,
63
(
1996
),
109
115
5.
K.M.
Davis
,
K.
Miura
,
N.
Sugimoto
, and
K.
Hirao
,
Optics Letters
, Vol
21
, No
21
,
1729
1731
.
6.
K.
Hirao
and
K.
Miura
,
Journal of Non-Crystalline Solids
,
239
(
1998
),
91
95
.
7.
M.
Will
,
S.
Nolte
,
A.
Tunnerman
, “
Single and multimode waveguides in glasses manufactured with femtosecond laser pulses
”,
SPIE Proc.
4633
(
2002
),
99
8.
E.N.
Glezer
,
L.
Huang
,
R.J.
Finlay
,
T.
Her
,
J.P.
Callan
,
C.
Schaffer
, and
E.
Mazur
, “
Ultrafast laser-induced microexplosions in transparent materials
”,
Boulder Damage Symposium
,
October 1996
.
9.
A.P.
Malshe
,
T.A.
Railkar
,
A.M.
Ozkan
,
P.A.
Molian
,
A.
Muyshondt
, and
W. D.
Brown
. “
Femtosecond Lasers: A Next Generation Tool for Processing of Semiconductors and Metals
”,
The Third Pacific Rim International Conference on Advanced Materials and Processing (PRICM 3) Proceedings, sponsored by the Minerals, Metals and Materials Society
,
Honolulu, Hawaii
,
July 1998
.
10.
A.M.
Ozkan
,
A.P.
Malshe
,
T.A.
Railkar
, and
W.D.
Brown
, “
Femtosecond Laser Induced Periodic Structure Writing on Diamond Crystals and Microclusters
”,
Applied Physics Letters
,
75
(
1999
),
3716
.
11.
A.M.
Ozkan
and
L.
Migliore
, “
Glass Processing Using Femtosecond and Nanosecond Pulsed Lasers
”,
SPIE
Vol.
4978
(
2003
),
162
.
13.
Casey
,
J. D.
,
Doyle
,
A. F.
,
Lee
,
R. G.
and
Stewart
,
D. K.
,
1994
.
Gas-assisted Etching with Focused Ion Beam Technology
.
Microelectronic Engineering.
,
24
,
43
50
.
14.
Phaneuf
,
M.W.
“FIB for Materials Science Applications – A Review”, Chapter in
Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice
,
Gianuzzi
,
L.A.
,
Prenitzer
,
B. I
,
Stevie
,
F.A
. (Eds.),
Kluwer / Plenum Press
(In Publication,
2003
).
15.
U.S. Provisional Patent filed on June 18, 2003
.
This content is only available via PDF.
You do not currently have access to this content.